DC211050Plasma Etcher

B B E E C C I I N N C C O O R R P P O O R R A A T T E E D D ELECTROMAGNETIC EMISSION TEST REPORT TEST STANDARD: Federal Communications Commission Title 47, Part 18 Device Under Test: SPI Supplies Plasma Prep III Plasma Etcher REPORT#: BEC-1066-1 TEST DATES: 03/03/09 to 03/24/09 ISSUE DATE: 03/30/09 PREPARED BY: Tony Mauriello, NARTE Certified EMC Engineer REVIEWED BY: Al Fanella, Test Director The results described in this report relate only to the item(s) tested. This document shall not be reproduced except in full without prior written permission of BEC Incorporated Report # BEC-1066-01 FCC Test Report SPI Supplies Plasma Prep III Release Date: 03/30/09 Page 2 of 14 TABLE OF CONTENTS 1.0 Administrative Information............................................................................................. 3 1.1 Description of the Device under Test (DUT)....................................................................... 3 1.2 Preface................................................................................................................................... 3 1.3 Summary............................................................................................................................... 4 1.4 Measurement Uncertainty..................................................................................................... 4 1.5 Test Equipment..................................................................................................................... 4 1.6 Condition of Received Sample............................................................................................. 4 1.7 General Description.............................................................................................................. 4 2.0 Equipment under Test...................................................................................................... 5 2.1 Test Configuration Rationale................................................................................................ 5 2.2 Test Configuration Diagram................................................................................................. 5 2.3 Climatic Environment........................................................................................................... 6 2.4 Selection of AC Power Voltages/Frequencies...................................................................... 6 2.5 Operating Mode.................................................................................................................... 6 2.6 Performance Verification During Emission Testing............................................................. 6 2.7 DUT Modifications............................................................................................................... 6 2.8 SPI Supplies Plasma Prep III DUT Picture........................................................................... 6 3.0 Applicable Requirements, Methods, and Procedures................................................... 7 3.1 Applicable Requirements...................................................................................................... 7 3.2 Basic Test Methods and Procedures..................................................................................... 8 3.3 Deviations or Exclusions from the Requirements................................................................ 8 4.0 Test Results........................................................................................................................ 9 4.1 Plasma Prep III ISM Frequency Data................................................................................... 9 4.2 Radiated Emissions............................................................................................................. 10 4.2.1 Test Facility..................................................................................................................... 10 4.2.2 Radiated Emissions Test Procedure................................................................................. 10 4.2.3 Radiated Emissions Test Results, FCC Part 18, 9kHz to 30MHz (03/09/09)................. 11 4.2.4 Radiated Emissions Test Results, FCC Part 18, 30 to 1000 MHz (03/09/09)................. 11 Appendix A – Test Equipment.................................................................................................. 14 Report # BEC-1066-01 FCC Test Report SPI Supplies Plasma Prep III Release Date: 03/30/09 Page 3 of 14 1.0 Administrative Information 1.1 Description of the Device under Test (DUT) Project Number BEC-1066 Equipment Identification 1066-01 Model Number Plasma Prep III Serial Number Proto#1 Test Location BEC Incorporated 970 East High Street Pottstown, PA 19464 Certifications: A2LA Cert. No 2597.01; FCC OATS Reg. No. 922038 Test Performed For SPI Supplies 569 East Gay Street West Chester, PA 19380 Test Personnel Steve Fanella/Al Fanella Technical Contact Al Meyer Date Received 03/03/09 Condition Received Suitable for test Sample Type Production Unit DUT Classification ISM 1.2 Preface This report documents product testing conducted to verify compliance of the specified DUT with applicable standards and requirements as identified herein. DUT, test instrument configurations, test procedures, and recorded data are generally described in this report. The reader is referred to the applicable test standards for detailed procedures. The following table summarizes the test results obtained during this evaluation. Report # BEC-1066-01 FCC Test Report SPI Supplies Plasma Prep III Release Date: 03/30/09 Page 4 of 14 1.3 Summary The SPI Supplies Plasma Prep III was tested and found to be compliant with the Federal Communications Commission (FCC) Title 47, Part 18. 1.4 Measurement Uncertainty No adjustments to measured data presented in this report are required because all values of uncertainty are less that the CISPR 16-4-2:2003 recommendations. These uncertainties have a coverage factor of k = 2, which yields …

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