2A583-AD100OHB_UTS N2 Purge System

Brillian Network & Automation Integrated System Co., Ltd. OHB N2 Purge System Operation Manual Ver 1.1 Version OHB N2_STB & OHB N2_AD100 The reproduction of any part of this user manual, in any from (by photocopying, microfilming or any other process) or the processing and distribution of the contents by electronic means is prohibited without the expressed written consent of Brillian. It is prohibited to copy the software or use it for other purposes. it is expressly prohibited to distribute copies of the software to third parties. Violators will be held liable for damage. Manufacturer and publisher Brillian Network & Automation Integrated System Co.,Ltd Add: No.41, Keyi St., Zhunan Township, Miaoli County 350, Taiwan, R.O.C. Tel: 886-37-580708 Fax: 886-37-580728 Email：[email protected] Website：http://www.brillian.com.tw I Brillian Network & Automation Integrated System Co., Ltd. Contents 1 Introduction............................................................................................................................. - 1 - 2 Description of safety rule of OHB N2 Purge System .................................................................. - 2 - 3 Description of starting steps ..................................................................................................... - 3 - 4 Description of stopping steps .................................................................................................... - 3 - 5 Emergency Stop and Recovery ................................................................................................. - 4 - 6 Facility Requirement ................................................................................................................ - 5 - 7 FCC........................................................................................................................................ - 5 - 8 OHB N2 AD100 Module ......................................................................................................... - 6 - 9 OHB N2 AD100 Module .......................................................................................................... - 9 - 9.1 Front Illustration -1 ..................................................................................................... - 9 - 9.2 Front Illustration -2 ..................................................................................................... - 9 - 9.3 Under Illustration ...................................................................................................... - 10 - 9.4 Plate Illustration ........................................................................................................ - 10 - 9.5 Light tower ............................................................................................................... - 11 - 10 Signal I/O List ....................................................................................................................... - 12 - 11 Communication Layout .......................................................................................................... - 12 - 12 OHB N2 AD100 Hardware .................................................................................................... - 13 - 12.1 Piping ....................................................................................................................... - 13 - 12.2 Hardware Method ..................................................................................................... - 13 - 12.3 Piping Connect.......................................................................................................... - 14 - 12.3.1 Facility Connect .................................................................................................... - 14 - 13 OHB N2 AD100 Vacuum generator adjust .............................................................................. - 15 - 14 BR PCB description ............................................................................................................... - 16 - 15 Alarm code & Alarm Analysis ................................................................................................ - 17 - 16 Periodical Maintenance .......................................................................................................... - 20 - 16.1 OHB AD100 Maintenance Table ................................................................................ - 20 - 16.2 Periodical maintenance Attention ............................................................................... - 21 - 17 Revision History .................................................................................................................... - 28 - - 1 - Brillian Network & Automation Integrated System Co., Ltd. 1 Introduction Brillian N2 Purge Solution is a series of nitrogen gas products designed specifically to remove moisture and oxygen content and extend Q-Time, including OHB N2, UTS (Under Track Storage) It can be used with semiconductor AMHS automation equipment, and it is small size and does not occupy space. In addition, it can be configured beside the process equipment far away from the storage system to shorten the OHT delivery time. Item OHB N2 UTS Installation location under the Fab automation track SIDE the Fab automation track Flow SLM ≤ 50 ≤ 50 Process Front of the process Back-end of the process Front of the process Back-end of the process FOUP Type Barrier & ASYST Entegris / ShinETsu Barrier & ASYST Entegris / ShinETsu - 2 - Brillian Network & Automation Integrated System Co., Ltd. 2 Description of safety rule of OHB N2 Purge System 2.1 Instruction for use。 2.1.1 This manual is only written for Purge System Module。 2.1.2 Non-qualified or non-professional personnel are not allowed to operate or maintain the machine。 2.1.3 “Operator” should read carefully the software operation in advance。 2.1.4 “Maintainer”, in addition to getting familiar with software operation, should read carefully the maintenance …

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Telefication B.V., Dept. FCC TCB.

External photo of EUT External photo of EUT

RFID Reader Model No：OHB N2_STB&OHB AD100 Input：AC110~230V Host interface：RS232 FCC ID：2A583-AD100 www.brillain.com.tw BrillianNetwork&Automation Made in Taiwan 44.5mm 16mm

Internal photo of EUT Internal photo of EUT Internal photo of EUT Antenna Internal photo of EUT Internal photo of EUT Antenna Port Internal photo of EUT

Brillian Network & Automation Integrated System Co.,Ltd TEST REPORT SCOPE OF WORK: 47 CFR FCC Part 15.209 – Radio Spectrum report Model: OHB N2_STB&OHB AD100 REPORT NUMBER 220300150THC-001 ISSUE DATE Apr. 14, 2022 PAGES 18 DOCUMENT CONTROL NUMBER GFT-OP-10h (28-Nov-2018) © 2020 Intertek Report No.: 220300150THC-001 This report is for the exclusive use of Intertek's Client and is provided pursuant to the agreement between Intertek and its Client. Intertek's responsibility and liability are limited to the terms and conditions of the agreement. Intertek assumes no liability to any party, other than to the Client in accordance with the agreement, for any loss, expense or damage occasioned by the use of this report. Only the Client is authorized to permit copying or distribution of this report and then only in its entirety. Any use of the Intertek name or one of its marks for the sale or advertisement of the tested material, product or service must first be approved in writing by Intertek. The observations and test results in this report are relevant only to the sample tested. This report by itself does not imply that the material, product, or service is or has ever been under an Intertek certification program. GFT-OP-10h (28-Nov-2018) Page 1 of 18 Test Report 0597 Radio Spectrum TEST REPORT Applicant: Brillian Network & Automation Integrated System Co., Ltd No. 41, Keyi St., Zhunan Township, Miaoli County 350402, Taiwan Product: OHB_UTS N2 Purge System Model No.: OHB N2_STB&OHB AD100 FCC ID: 2A583-AD100 Test Method/ Standard: 47 CFR FCC Part 15.209 Test By: Intertek Testing Services Taiwan Ltd., Hsinchu Laboratory No. 11, Lane 275, Ko-Nan 1 Street, Chia-Tung Li, Shiang-Shan District, Hsinchu City, Taiwan Zero Chen Engineer Rico Deng Reviewer Report No.: 220300150THC-001 GFT-OP-10h (28-Nov-2018) Page 2 of 18 TEST REPORT Revision History Report No. Issue Date Revision Summary 220300150THC-001 Apr. 14, 2022 Original report Report No.: 220300150THC-001 GFT-OP-10h (28-Nov-2018) Page 3 of 18 TEST REPORT Table of Contents Summary of Test Data ................................................................................................................ 4 1. General Information ............................................................................................................... 5 1.1 Identification of the EUT .................................................................................................. 5 1.2 Antenna description ......................................................................................................... 5 2. Test specifications ................................................................................................................... 6 2.1 Test standard .................................................................................................................... 6 2.2 Operation mode ............................................................................................................... 6 2.3 Peripherals equipment ..................................................................................................... 6 3. Radiated emission test FCC 15.209 ........................................................................................ 7 3.1 Operating environment .................................................................................................... 7 3.2 Test setup & procedure .................................................................................................... 7 3.3 Radiated emission limit .................................................................................................... 9 3.3.1 General radiated emission limit .................................................................................... 9 3.4 Radiated emission test data FCC 15.209 ........................................................................ 10 3.4.1 Measurement results: Fundamental emission............................................................ 10 3.4.2 Measurement results: Frequencies equal to or less than 1 GHz ................................ 10 4. Conducted emission FCC 15.207 .......................................................................................... 13 4.1 Measuring instrument setting ........................................................................................ 13 4.2 Test Procedure ................................................................................................................ 13 4.3 Test Diagram ................................................................................................................... 14 4.4 Limit ................................................................................................................................ 14 4.5 Test Results ..................................................................................................................... 15 Appendix A: Test equipment list ............................................................................................... 17 Appendix B: Measurement Uncertainty ................................................................................... 18 Report No.: 220300150THC-001 GFT-OP-10h (28-Nov-2018) Page 4 of 18 TEST REPORT Summary of Test Data Test Requirement Applicable Rule Result Radiated Emission test 15.209 Pass Conducted Emission test 15.207 Pass Antenna Requirement 15.203 Pass Note: Please note that the test results with statement of conformity, the decision rules which are based on: Safety Testing: the specification, standard or IEC Guide 115. Other Testing: the specification, standard and not taking into account the measurement uncertainty. Report No.: 220300150THC-001 GFT-OP-10h (28-Nov-2018) Page 5 of 18 TEST REPORT 1. General Information 1.1 Identification of the EUT Product: OHB_UTS N2 Purge System Model No.: OHB N2_STB&OHB AD100 Operating Frequency: 134 kHz Rated Power: 110~230Vac, 50~60Hz Power Cord: N/A Sample receiving date: 2022/03/09 Sample condition: Wo…

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Conducted Emission Test set-up photo

Radiated Emission Test set-up photo 9kHz~30MHz Radiated Emission Test set-up photo 30MHz~1GHz