OPO199909010001Communication Modem Controller

FCC ID : OPO199909010001 CRP6T3142-01E Rev.0 1/15 Shinko Manufacturing number: CONFIDENTIAL OPERATION MANUAL Of OHVC (INTRABAY OHT SYSTEM) Sep 6. 1999 FCC ID : OPO199909010001 CRP6T3142-01E Rev.0 2/15 History Rev.DateDescriptionAppChkDrwn 0‘99.09.06First issueY.F FCC ID : OPO199909010001 CRP6T3142-01E Rev.0 3/15 ***** CONTENTS ***** 1. General ------------------------------------------------------------------------------------------------------- 1.1 Application ------------------------------------------------------------------------------------------------ 2. System Configuration ----------------------------------------------------------------------------------- 2.1 System Configuration --------------------------------------------------------------------------------- 3. System Startup ------------------------------------------------------------------------------------------- 3.1 System startup procedure --------------------------------------------------------------------------- 3.2 System shutdown procedure ----------------------------------------------------------------------- 3.3 Error recovery procedure ---------------------------------------------------------------------------- 4. Transpotation Control ---------------------------------------------------------------------------------- 4.1 Basic transport flow ----------------------------------------------------------------------------------- 5. OHVC operation ------------------------------------------------------------------------------------------ 5.1 Operation mode control ------------------------------------------------------------------------------ 5.1.1 Maintenance mode ---------------------------------------------------------------------------------- 5.1.2 Manual mode ------------------------------------------------------------------------------------------ 5.1.3 Auto mode ---------------------------------------------------------------------------------------------- 5.1.4 Paused mode ------------------------------------------------------------------------------------------ 5.1.5 Shutdown ----------------------------------------------------------------------------------------------- 5.2 Display control ------------------------------------------------------------------------------------------ 5.3 Log ----------------------------------------------------------------------------------------------------------- 5.4 Statistics --------------------------------------------------------------------------------------------------- 5.5 Manual operation --------------------------------------------------------------------------------------- 5.6 Maintenance operation ------------------------------------------------------------------------------- 5.7 Parameter setup ---------------------------------------------------------------------------------------- 5.8 Engineer --------------------------------------------------------------------------------------------------- 5.9 HELP ------------------------------------------------------------------------------------------------------- 4 4 4 4 5 5 5 5 7 8 8 8 8 8 8 8 8 9 10 11 12 13 14 15 15 FCC ID : OPO199909010001 CRP6T3142-01E Rev.0 4/15 CHAPTER 1 General 1.1 Application This document describes the operation method of OHVC. CHAPTER 2 SYSTEM CONFIGURATION 2.1 System configuration The OHVC control the transportation of FOUP using several kinds of communication lines. A system configuration is shown in Fig. 1. Fig.1 System Configuration FCC ID : OPO199909010001 CRP6T3142-01E Rev.0 5/15 CHAPTER 3 SYSTEM STARTUP 3.1 System startup procedure The following procedure is used for ONLINE operation of OHVC. (1)Apply powersource for OTH system. (2)Power On OHVC, and wait completion of windows startup. (3)Enter CTRL+ALT+DEL, and ENTER for login window(no password). (4)Start OHVC application program as follows. a) Click and activate the process from windows console as follows, START-PROGRAM-OHVCSYSTEM-OHVC then OHVC monitor screen is displayed on the screen, and operation mode will be changed from startup to maintenance mode. b) Login using login box (User: sdk password: ***). (5)Start Auto mode operation as follows. a)Click operation mode box, and select Manual mode. b)Entry all vehicles using vehicle entry dialog screen that is activated by manual command menu bar. c)Click operation mode box, and select Hold mode, and select Auto mode. After that, all vehicles start running on the monitor screen. d)Then, OHVC is able to accept and execute Remote Command from the HOST computer. 3.2 System shutdown procedure The following procedure is used for shutdown operation of OHVC. (1)Termination of Auto mode operation a)Click operation mode box, and select manual mode. (2)Shut down of OHVC a)Click operation mode box, and select maintenance mode. b)Click operation mode box, and select shutdown. c)Shutdown windows using Windows system shutdown window. d)Power off OHVC . (3)Shutdown power source of OHT system. 3.3 Error recovery procedure of OHVC (1)OHVC is changed the control mode from Auto to Hold mode if several error occured. All vehicles are stopped by OHVC. (2)Remove error, and perform Error reset operation by maintenance menu bar. (3)Perform Reentry operation by maintenance menu bar. (4)If need, delete transport request using Trans.Req screen and delete the request command from Host. (5)Change the OHVC mode from Paused to Auto, then all vehicle continue transportaion. FCC ID : OPO199909010001 CRP6T3142-01E Rev.0 6/15 Power On (Windows).Not function Key operation (Startup/Shutdown) MAINTENANCE MODE (TSCINIT) .Maintenance operation is available Key operation (Mainte<->Manual) MANUAL MODE (TSCINIT) .Manual operation is available Key operation (Manual->Hold) Key oparation (Auto->Manual) MODE (AUTO) .Host command is available Key operation (Auto<->Hold) or Alarm condition HOLD MODE (PAUSED) .Host comand is available .Transportation is paused Figure.2 OHVC Mode control FCC ID : OPO199909010001 CRP6T3142-01E Rev.0 7/15 Chapter 4 Tr…

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FCC ID : OPO199909010001 KEN72-3699(E)Rev.0 1 CONFIDENTIAL “SELOHT SOHT-300” OHT Vehicle Operation Manual of SHINKO OHT SYSTEM Aug.31, 1999(Rev.0) Shinko Electric Co., LTD Ise Japan FCC ID : OPO199909010001 KEN72-3699(E)Rev.0 2 Revision Note #Revision Month/Day/Year ContentsAuthor #1Rev.0Aug.31, 1999The first edition(Preliminary)Masanao Murata FCC ID : OPO199909010001 KEN72-3699(E)Rev.0 3 Table of contents Safety precautions............................................................................................................................... 5 (1) General..................................................................................................................................... 5 (2) Definitions of Danger and Warning ...................................................................................... 5 (3) Precautions on use................................................................................................................. 6 (4) Storage..................................................................................................................................... 7 (5) Transportation......................................................................................................................... 7 (6) Installation ............................................................................................................................... 7 (7) Operations ............................................................................................................................... 8 (8) Maintenance and lnspection..................................................................................................8 1.General............................................................................................................................................... 9 1.1 Application .............................................................................................................................. 9 1.2 Related SEMI document ........................................................................................................ 9 1.3 Related Rules, Laws .............................................................................................................. 9 1.4 Abbreviations ......................................................................................................................... 9 2.Outline of OHT System and Vehicle .............................................................................................10 2.1 Purpose of OHT .................................................................................................................... 10 2.2 OHT system .......................................................................................................................... 10 2.3 Non-contact power supply .................................................................................................. 12 2.4 FCC rules............................................................................................................................... 13 2.5 FCC Notice and Warning .....................................................................................................14 3.OHT Vehicle..................................................................................................................................... 15 3.1 External View of the OHT Vehicle....................................................................................... 15 3.2 Name of the parts and function .......................................................................................... 16 3.3 safety consideration ........................................................................................................... 19 3.4 Separation of vehicles and operators................................................................................ 20 4.Specification ................................................................................................................................... 21 4.1General Specification ........................................................................................................... 21 4.2 Basic technical specification ..............................................................................................22 5Auto Mode and Manual ................................................................................................................... 23 5.1 Operation mode of the Vehicle ........................................................................................... 23 5.2 Auto mode............................................................................................................................. 23 5.3 Manual mode ........................................................................................................................ 23 6Teaching ........................................................................................................................................... 24 6.1 Reference....................................................................................................................... 24 FCC ID : OPO199909010001 KEN72-3699(E)Rev.0 4 6.2 Two kinds of teaching ......................................................................................................... 24 7.Move in and move out of the vehicle............................................................................................ 26 7.1 construction.......................................................................................................................... 26 7.2 Replacement of the vehicle.................................................................................................26 8. Removal of FOUP from OHV and manual lifting of gripper unit .............................................. 29 8.1.Two cases in manual removal of FOUP............................................................................. 29 8.2. Two kinds of removal procedures.........…

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KEN72-3644(E)1 Confidential “SELOHT SOHT-300” OHT Teaching Manual Aug.31, 1999 Shinko Electric Co., LTD KEN72-3644(E)2 Revision Note #Revision Month/Day/Year ContentsAuthor #1Rev.0May 24, 1999The first edition(Preliminary)Nobuhiro Gunge #2Rev.1Aug 31, 1999Change to match #3 vehicle Nobuhiro Gunge Motonori Inagaki Masanao Murata KEN72-3644(E)3 Contents 1.General ...............................................................................................................................................4 2. Application........................................................................................................................................4 3. Reference ..........................................................................................................................................4 4. Preparation for teaching .................................................................................................................4 4.1 Preparation of remote control box .......................................................................................4 4.2 Preparation of teaching tool (for Semi-automatic teaching only).....................................4 4.3 Preparation of the vehicle......................................................................................................4 4.4 Preparation of the load port ..................................................................................................5 4.4.1 In the case of manual teaching ..........................................................................................5 4.4.2 In the case of semi-automatic teaching ............................................................................5 5. Manual teaching ..............................................................................................................................1 5.1 Adjustment of gripper height ................................................................................................1 5.2 Position adjustment (See figure 5.1) ..................................................................................1 5.3 Adjustment of the height where creep motion begin .........................................................1 5.4 Teaching ..................................................................................................................................1 5.5 Return to origin.......................................................................................................................1 5.6 Confirmation of the Load/Unload .........................................................................................1 6.Semi-automatic teaching .................................................................................................................1 7. Confirmation of the taught point....................................................................................................1 8. Up load of the teaching data to the OHVC from the vehicle to the OHVC.................................1 9. Down load of the teaching data to the vehicle from the OHVC ..................................................1 KEN72-3644(E)4 1.General This document describes the teaching methods for SHINKO OHT System. There are two kinds of teaching methods as follows (1) Manual teaching : Teaching by use of remote control box (2) Semi-automatic teaching : Teaching by use of teaching tools and remote control box 2. Application This document applies to the “SELOHT SOHT-300”. 3. Reference (1)Remote control box specification (KEN72-3501(E)) (2)Remote control box operation manual (KEN72-3502(E)) 4. Preparation for teaching 4.1 Preparation of remote control box (1) Set the F number of the remote control box to the same F number of the Vehicle which will be taught. (2)Turn on the power switch of the remote control box. Regarding the operation of remote control box, refer to operation manual of remote control box 4.2 Preparation of teaching tool (for Semi-automatic teaching only) In the case of Semi-automatic teaching, prepare the following tools. And form a teatching set shown in figure 4.1 (1) LED for teaching (Target LED) (2) PSD unit (3) Power Supply (4) PC(Personal Computer) for teaching (5) Communication unit(Ground side) 4.3 Preparation of the vehicle (1) Set the Mode switch of the control panel to the “local mode “. Or, set the mode of the vehicle to the local mode by the function of OHVC. (2) Stop the vehicle at the station for teaching by the function of run for positioning of remote control box. As to the switch, refer to remote control box operation manual. KEN72-3644(E)5 4.4 Preparation of the load port 4.4.1 In the case of manual teaching Put a FOUP on the load port. 4.4.2 In the case of semi-automatic teaching Put a PSD unit on the load port.

FCC ID : OPO199909010001 KEN72-3696 1 CONFIDENTIAL “SELOHT SOHT-300” SYSTEM OPERATION MANUAL of SHINKO OHT SYSTEM FCC ID : OPO199909010001 KEN72-3696 2 Table of contents SAFETY PRECAUTIONS ............................................................................................................................................... 3 1.GENERAL ...................................................................................................................................................................... 7 1.1 A PPLICATION............................................................................................................................................................ 7 1.2 R ELATED SEMI DOCUMENT..................................................................................................................................... 7 1.3 R ELATED RULES, LAWS............................................................................................................................................ 7 1.4 A BBREVIATIONS........................................................................................................................................................ 7 2. OUTLINE OF OHT SYSTEM..................................................................................................................................... 8 2.1 C ONSTRUCTION OF OHT SYSTEM............................................................................................................................. 9 2.2 N ON-CONTACT POWER SUPPLY...............................................................................................................................11 2.3 FCC R ULES............................................................................................................................................................. 12 3 SPECIFICATION ........................................................................................................................................................ 14 3.1 GENERAL CONDITION ...................................................................................................................................... 14 3.2 S YSTEM COMPONENT AND CONSTRUCTION............................................................................................................. 18 4. TRANSPORTATION CONTROL ............................................................................................................................ 23 5. ERROR HANDLING ................................................................................................................................................. 24 5.1 G ENERAL................................................................................................................................................................ 24 5.2 E RROR HANDLING................................................................................................................................................... 25 5.3 R ECOVERY PROCEDURE IN CASE OF HEAVY ERROR OF A VEHICLE.......................................................................... 28 6. RELATED DOCUMENTS......................................................................................................................................... 29 FCC ID : OPO199909010001 KEN72-3696 3 Safety precautions (1) General
Prior to using this product, make sure the “Safety Precautions”, Maintenance Instruction Manual and other attached documents shall be well read and understood for appropriate application.
Engage specialists in electrical works.
Don’t improve the product by yourselves.
Be sufficiently proficient with the equipment, the relevant safety knowledge and the precautions prior to using this product. In the content of this “Safety Precautions”, items which need to be cautions of out shall be classified into “Danger” and “Warning”. (2) Definitions of Danger and Warning [Note 1] Medium degree of injuries or light injuries refers to injuries, e.g., burns and electric shock, which do not require hospitalization of or prolonged hospital visit by the victims. As material losses refers to expanded losses pertaining to the damage of property and equipment. Note that, depending on the situation, the events described under “Warning” may also result in severe outcome. In either case, make sure that the advice is followed. After reading, make sure this information shall be kept at places where it can always be read by users. FCC ID : OPO199909010001 KEN72-3696 4 (3) Precautions on use Danger Follow the following advice strictly to avoid electric shock or burns. 1. Don’t enter the operation area of the vehicle. Work on the ladder may collide to the vehicle and may cause injury. 2. Don’t touch the vehicle on the track when Power Supply Panel output the power. 3. Don’t touch the moving parts of the vehicle while it is in operation. Doing so may cause injuries. 4. Don’t touch and Teaching and maintenance shall be done by a qualified person. 5. Make sure the earth terminals for the relate equipment shall be grounded. Not doing so may cause electric shock. 6. Don’t break the cable, impose excessive stress, place heavy weights, or pinch it between items. Doing so may cause electric shock. Warning Don’t use the equipment at locations where water, corrosive atmosphere, or flammable gas is present, or beside flammable items. Doing so may cause life and fails. FCC ID : OPO199909010001 KEN72-3696 5 (4) Storage Prohibition 1. Don’t store the equipment at locations where it is subject to rain, water hazardous gas or liquid. Mandatory Implementation 1. Store the equipment at locations in not subjected to sun shine. Store it at predetermined relative humidity and temperature. 0 50 ,90% RH and below, no dew. (5) Transportation Warning 1. Don’t carry in a manner except for designated. Doing so may cause materiales loss or injuries. Mandatory Implementation 1. The equipment may be broken when overloaded. Follow the advice o…

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1) When either of alarm lamps (I)(J)(K)(L) lights up, it stops output current. 2) Remedy the cause. 3)Push Reset Switch (M). The lighting alarm lamp put off. 4) Push Start Switch (O). Again, the output current flows. SECTION5. TROUBLESHOOTING Table-1 TROUBLESHOOTING SECTION6. SPARE PARTS LIST Table-2 SPARE PARTS LIST SECTION7. BLOCK DIAGRAM 1 OPERATING MANUAL POWER SUPPLY MODEL: IEC-91-1 1) When either of alarm lamps (I)(J)(K)(L) lights up, it stops output current. 2) Remedy the cause. 3)Push Reset Switch (M). The lighting alarm lamp put off. 4) Push Start Switch (O). Again, the output current flows. SECTION5. TROUBLESHOOTING Table-1 TROUBLESHOOTING SECTION6. SPARE PARTS LIST Table-2 SPARE PARTS LIST SECTION7. BLOCK DIAGRAM 2 Preliminary ISSUED ON:1999.8.10 1) When either of alarm lamps (I)(J)(K)(L) lights up, it stops output current. 2) Remedy the cause. 3)Push Reset Switch (M). The lighting alarm lamp put off. 4) Push Start Switch (O). Again, the output current flows. SECTION5. TROUBLESHOOTING Table-1 TROUBLESHOOTING SECTION6. SPARE PARTS LIST Table-2 SPARE PARTS LIST SECTION7. BLOCK DIAGRAM 3 SHINKO ELECTRIC CO.,LTD ENGINEERING DEPARTMENT CONTENTS SECTION 1. INTRODUCTION SECTION 2. SPECIFICATIONS AND RATING 2-1 BASIC SPECIFICATIONS 2-2 ELECTRIC SPECIFICATIONS A. INTERFACE SECTION 3. FUNCTION OF CONTROLS 1) When either of alarm lamps (I)(J)(K)(L) lights up, it stops output current. 2) Remedy the cause. 3)Push Reset Switch (M). The lighting alarm lamp put off. 4) Push Start Switch (O). Again, the output current flows. SECTION5. TROUBLESHOOTING Table-1 TROUBLESHOOTING SECTION6. SPARE PARTS LIST Table-2 SPARE PARTS LIST SECTION7. BLOCK DIAGRAM 4 SECTION 4. OPERATING 4-1 DISTRIBUTION PANEL UNIT 4-2 POWER SUPPLY UNIT 4-3COMMUNICATION MODEM CONNTROLLER UNI 4-4EMERGENCY STOP A. MONITOR SECTION 5.TROUBLESHOOTING TABLE-1 TROUBLESHOOTING SECTION 6. SPARE PARTS LIST TABLE-2 SPARE PARTS LIST SECTION 7. BLOCK DIAGRAM FIG-1 BLOCK DIAGRAM 1) When either of alarm lamps (I)(J)(K)(L) lights up, it stops output current. 2) Remedy the cause. 3)Push Reset Switch (M). The lighting alarm lamp put off. 4) Push Start Switch (O). Again, the output current flows. SECTION5. TROUBLESHOOTING Table-1 TROUBLESHOOTING SECTION6. SPARE PARTS LIST Table-2 SPARE PARTS LIST SECTION7. BLOCK DIAGRAM 5 NOTICE SECTION 1. INTRODUCTION SHINKO OHT SYSTEM is constructed from Vehicle, Track, Maintenance Lifter, OHVC, Power Supply and etc. This Power Supply has the following part. 1) Supply of electric power to Vehicle It generates alternating current of 8.66KHz, 50A. It supplies electric power to Vehicle. 1) When either of alarm lamps (I)(J)(K)(L) lights up, it stops output current. 2) Remedy the cause. 3)Push Reset Switch (M). The lighting alarm lamp put off. 4) Push Start Switch (O). Again, the output current flows. SECTION5. TROUBLESHOOTING Table-1 TROUBLESHOOTING SECTION6. SPARE PARTS LIST Table-2 SPARE PARTS LIST SECTION7. BLOCK DIAGRAM 6 2) Communication Modem Controller between Vehicle and OHVC 3) Receive and supply of electric power It receives electric power of 208 V of 3 phases. It supplies electric power to devices of the system. SECTION 2. SPECIFICATIONS and RATINGS 2-1 Basic specifications Operating Temperature Ranges:1040 Storage Temperature Ranges:050 Humidity3090RH CoolingAir cooling Weight400Kg Dimensions1000W*500D*2150H Paint colorWhite Mansel N9 Coating with paint 2-2 Electric specifications 1) When either of alarm lamps (I)(J)(K)(L) lights up, it stops output current. 2) Remedy the cause. 3)Push Reset Switch (M). The lighting alarm lamp put off. 4) Push Start Switch (O). Again, the output current flows. SECTION5. TROUBLESHOOTING Table-1 TROUBLESHOOTING SECTION6. SPARE PARTS LIST Table-2 SPARE PARTS LIST SECTION7. BLOCK DIAGRAM 7 1) Distribution Panel Unit Input Capacity9KVA Phase 3-phase Voltage208V10% Frequency60Hz OutputMaintenance Lifter Capacity600W Phase 3-phase Voltage208V10% Frequency60Hz OutputOHVC Capacity600W Phase 1-phase Voltage120V10% Frequency60Hz 1) When either of alarm lamps (I)(J)(K)(L) lights up, it stops output current. 2) Remedy the cause. 3)Push Reset Switch (M). The lighting alarm lamp put off. 4) Push Start Switch (O). Again, the output current flows. SECTION5. TROUBLESHOOTING Table-1 TROUBLESHOOTING SECTION6. SPARE PARTS LIST Table-2 SPARE PARTS LIST SECTION7. BLOCK DIAGRAM 8 Power Supply Unit Capacity6KW Phase 3-phase Voltage208V10% Frequency60Hz 2) Power Supply Unit Output Capacity5KW Phase1-phase Voltage360440V Current50A Frequency8.66KHz CMC Frequency of communicationtransmit 300KHzcentral frequency receive 350KHzcentral frequency 1) When either of alarm lamps (I)(J)(K)(L) lights up, it stops output current. 2) Remedy the cause. 3)Push Reset Switch (M). The lighting alarm lamp put off. 4) Push Start Switch (O). Again, the output current flows. SECTION5. TROUBLESHOOTING Table-1 TROUBLESHOOTING SECTION6. SPARE PARTS LIST Table-2 SPARE PARTS LIST SECTION7. BLOCK DIAGRAM 9 CommunicationRS-422 A. Interface 1)Power-input of Distribution Panel Circuit Breaker MCB11 L1 L2 L3 GND 2) Power-output of Distribution Panelfor Maintenance Lifter Circuit Breaker MCB13 L12 L22 L32 GND 1) When either of alarm lamps (I)(J)(K)(L) lights up, it stops output current. 2) Remedy the cause. 3)Push Reset Switch (M). The lighting alarm lamp put off. 4) Push Start Switch (O). Again, the output current flows. SECTION5. TROUBLESHOOTING Table-1 TROUBLESHOOTING SECTION6. SPARE PARTS LIST Table-2 SPARE PARTS LIST SECTION7. BLOCK DIAGRAM 10 3) Power-output of Distribution Panelfor OHVC Circuit Breaker MCB14 L13 L23 GND 4) Power-output of Power Supply Terminal Block TB21 U V GND 5) Connection with OHVC Terminal Block TB22 1) When either of alarm lamps (I)(J)(K)(L) lights up, it stops output current. 2) Remedy the cause. 3)Push Reset Switch (M). The lighting alarm lamp put off. 4) Push Start Switch (O). Again, the output current flows. SECTION5. TROUBLESHOOTING Table-1 TROUBLESHOOTING SECTION6. SPARE PARTS LIST Table-2 S…

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DISTRIBUTION PANEL POWER SUPPLY UNIT CMC UNIT INPUT3~,AC208V MCB11 MC11 MCB12 MCB1 Noise MC1 Chopper Inverter Transformer Filter CT9KVA Filter Transformer AC/DC Controller AC/DC Controller EMO 208/120V +24v +24v normal close MCB13 MCB14208V 120VMaintenance OHVC xsdV|POOQ OUTPUT8.66KHz50AOHVCcommunication xsdV|POOQ

Ferrite core COM Demodulater TX Amp RX Amp RX filter Modulater Host I/F Indicate LED Resonance circuit 350KHz Serial I/F TTL Switch circuit Control logic COM block diagram TX transformer RX transformer Power Line Reset circuit X'tal OSC 24MHz Ferrite core 300KHz Ferrite core +12V +5V -12V +24V 0V CPU Board From OHT track To OHT track (COM=COmunication Modem) Squelch Power Supply FCC ID:OPO199909010001

CMC BV-BM2 Demodulater BV-BC TX Amp RX Amp RX filter Modulater Control logic Line driver Line receiver Indicate LED Master/Slave I/F Resonance circuit 350KHz Line receiver Line driver Serial I/F RS232C AC/DC 5V +12V -12V 25W AC/DC 24V 50W Switch circuit Control logic CMC block diagram TX transformer RX transformer Power Line Reset circuit Reset circuit X'tal OSC 24MHz Ferrite core 300KHz Ferrite core AC208V FG E +5V +12V +5V 0V -12V +24V 0V OHVC From 8.66KHz power s…

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