QTA-AF120SensArray Automation FOUP

9022549‐000 AH KLA - Automation User Guide KLA - Automation User Guide 9022549-000 / AH KLA - Confidential - Restricted Distribution Page Intentionally Blank KLA Technical Publications One Technology Drive, Milpitas, CA. 95035 KLA - Corporation is preliminary document is not complete. This document contains significant omissions and inaccuracies. GSS Technical Publications distributes this preliminary draft for review purposes only. Customers and KLA- Customer Service Engineers should not use this document while installing, servicing, or using the KT Automation System. Any input regarding the accuracy of the content of this document is welcome and appreciated.i KLA - Restricted Distribution KLA Automation User Guide 9022549-000 / AH Printed in Milpitas KLA - Restricted Distribution Copyright Copyright © 2016-2017 by KLA. All rights reserved worldwide. No part of this publication may be reproduced, modified, transmitted, transcribed, stored in retrieval systems, or translated into any human or computer language, in any form or by any means, electronic, mechanical, magnetic, chemical, manual, or otherwise, without the express written permission of KLA, One Technology Drive, Milpitas, California 95035. KLA may revise this document at any time without notice. Trademarks KLA Automation ™ System, SensArray® Temperature Wafers, and Automation Metrology™ Wafers are trademarks of KLA Corporation. KLA ® and the KLA logo are registered trademarks of the KLA Corporation. All other brand and product names may be trademarks of their respective companies. Reprint Acknowledgments This document contains excerpts from the following SEMI® Standards and/or Safety Guidelines: SEMI S1-0708E, “Safety Guidelines for Equipment Safety Labels,” and SEMI S2-0709, “Environmental Health, and Safety Guidelines for Semiconductor Manufacturing Equipment,” Copyright © Semiconductor Equipment and Materials International 2009. All Rights Reserved. Used by Permission. SEMI is a registered trademark of Semiconductor Equipment and Materials International. www.semi.org Original Instructions. Send any comments to: [email protected] NCC Warning Statement According to “Administrative Regulations on Low Power Radio Waves Radiated Devices” Without permission granted by the NCC, any company, enterprise, or user is not allowed to change the frequency, enhance transmitting power or alter original characteristics as well as performance to an approved low power radio-frequency devices. The low power radio-frequency devices must not influence aircraft security and interfere legal communications; If found, the user must cease operating immediately until no interference is achieved. The said legal communications means radio communications is operated in compliance with the Telecommunications Act. The low power radio-frequency devices must be susceptible with the interference from legal communications or ISM radio wave radiated devices. Taiwan: NCC warning 根据“低功率无线电波辐射设备管理规定”，未经NCC许可，任何公司，企业或用户均不得将频率更改，提 高发射功率或将原始特性和性能更改为批准的低功率。 电力射频设备。 低功率射频设备不得影响航空器的安 全和干扰法律通信； 如果发现，则用户应立即停止操作，直到没有干扰为止。 所述合法通信是指无线电通信 是根据《电信法》进行操作的。 低功率射频设备必须易于受到合法通信或ISM无线电波辐射设备的干扰。 KTDC-1704813293-501 KLA-Confidentiali Table of Contents Preface . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3 Manual Purpose . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3 Manual Structure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3 Reference Documentation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4 Conventions Used in this Manual. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4 1 Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5 1.1 KLA Automation System Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5 1.2 KLA Automation System Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6 1.3 KLA Automation Missions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7 1.4 Regulatory Compliance Statements . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8 1.4.1Prohibitions on Modifications . . . . . . . . . . . . . . . . . . . . . . . . . . 8 1.4.2Class A Digital Device . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8 1.4.3Special Accessory Installation: Manual Use Laptop/FOUP cable. . . 8 1.4.4Singapore Regulatory Statement . . . . . . . . . . . . . . . . . . . . . . . 8 1.4.5Israel Regulatory Statement. . . . . . . . . . . . . . . . . . . . . . . . . . . 8 1.4.6Input Power for Battery Charging . . . . . . . . . . . . . . . . . . . . . . . 9 1.4.7Environmental conditions for the equipment . . . . . . . . . . . . . . 10 1.4.8Critical component list . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10 2 KLA Automation System Hardware Components . . . . . . . . . . . . . . 11 2.1 KLA Automation Station. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11 2.1.1KLA Automation Station Function . . . . . . . . . . . . . . . . . . . . . . 11 2.1.2KLA Automation Station Indicator Panel LEDs. . . . . . . . . . . . . . 12 2.1.3KLA Automation Station Indicator Panel Manual/Auto Button . . . 13 2.2 KLA Automation FOUP . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13 2.2.1KLA Automation FOUP Function . . . . . . . . . . . . . . . . . . . . . . . 13 2.2.2KLA Automation FOUP Indicators and Controls . . . . . . . . . . . . . 14 2.2.3KLA Automation FOUP Data Storage and Transfer . . . . . . . . . . . 15 2.2.4KLA Automation FOUP Battery . . . . . . . . . . . . . . . . . . . . . . . . 15 2.2.5Option: Emulating Occupied KLA Automation FOUP Slots . . . . . . 16 2.2.6Reset the KLA Automation FOUP (software restart) . . . . . . . . . . 16 3 KLA AM Station Application UI . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19 3.1 Access to UI . . . . . . . . . . . . . . . . . …

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AF120 Regulatory Insert Part 15 statement: This device complies with Part 15 of the FCC Rules. Operation is subject to the following two conditions: (1) This device may not cause harmful interference, and (2) this device must accept any interference received, including interference that may cause undesired operation. FCC RF Exposure statement: This equipment complies with FCC radiation exposure limits set forth for an uncontrolled environment. This equipment should be installed and operated with a minimum distance of 20 cm between the radiator and your body.

SCS-F18: Project and Product Certification Representative Authorization Letter Page 1 of 2 Rev 6.0 775 Montague Expressway Milpitas, CA 95035 Tel: 408-526-1188 Fax: 408-526-1088 Email: [email protected] Project and Product Certification Representative Authorization Letter Reason for Amendment (current / obsolete) Revision History Approved Date From To Initial Release (obsolete) 1.0 1.0 Nov-14-2006 Revised wording (obsolete) 1.0 2.0 Sept–25-2007 Updated company template (obsolete) 2.0 3.0 Jan-31-2012 Updated letter information (obsolete) 3.0 4.0 May-23-2014 Added FCC ID field (obsolete) 4.0 5.0 Sep-16-2014 Updated company name & logo (current) 5.0 6.0 Jun-27-2018 SCS-F18: Project and Product Certification Representative Authorization Letter Page 2 of 2 Rev 6.0

SCS-F19: Confidentiality Request Letter Page 1 of 2 Rev 6.0 775 Montague Expressway Milpitas, CA 95035 Tel: 408-526-1188 Fax: 408-526-1088 Email: [email protected] Confidentiality Request Letter Reason for Amendment (current / obsolete) Revision History Approved Date From To Initial Release (obsolete) 1.0 1.0 Nov-14-2006 Adding CFR 2.459 (obsolete) 1.0 2.0 August – 11 - 2008 Updated company template & Added text box (obsolete) 2.0 3.0 Jan-31-2012 Added IC confidentiality letter form (obsolete) 3.0 4.0 March-26-2015 Corrections to STC form. Added reference to KDB (obsolete) 4.0 5.0 Nov-19-2015 Updated company logo (current) 5.0 6.0 Jun-26-2019 SCS-F19: Confidentiality Request Letter Page 2 of 2 Rev 6.0

SCS-F19: Confidentiality Request Letter Page 1 of 2 Rev 6.0 775 Montague Expressway Milpitas, CA 95035 Tel: 408-526-1188 Fax: 408-526-1088 Email: [email protected] Confidentiality Request Letter Reason for Amendment (current / obsolete) Revision History Approved Date From To Initial Release (obsolete) 1.0 1.0 Nov-14-2006 Adding CFR 2.459 (obsolete) 1.0 2.0 August – 11 - 2008 Updated company template & Added text box (obsolete) 2.0 3.0 Jan-31-2012 Added IC confidentiality letter form (obsolete) 3.0 4.0 March-26-2015 Corrections to STC form. Added reference to KDB (obsolete) 4.0 5.0 Nov-19-2015 Updated company logo (current) 5.0 6.0 Jun-26-2019 SCS-F19: Confidentiality Request Letter Page 2 of 2 Rev 6.0

SCS-F190 WiFi Channel 12&13 Declaration Letter Page 1 of 2 Rev.2.0 Created by William Graff Approved by Bao-Thuong Nguyen WIFI Channel 12 and 13 Declaration Letter Reason for Amendment Revision History Approved Date From To Initial Release (obsolete) Initial 1.0 December 22, 2015 Modify the select options (current) 1.0 2.0 September 23, 2016 SCS-F190 WiFi Channel 12&13 Declaration Letter Page 2 of 2 Rev.2.0 Created by William Graff Approved by Bao-Thuong Nguyen

EUT Photo-External view EUT – Front View EUT – Rear View EUT – Top View EUT – Bottom View EUT – Left View EUT – Right View

ʥʩʣʸ ʸʣʺʡ ʺʥʲʸʴʤʬ ʭʥʸʫʬ ʬʥʬʲ ʤʦ ʸʶʥʮ , ʺʩʺʩʡ ʤʡʩʡʱʡ CLASS A ʸʶʥʮ ʠʥʤ ʤʦ ʸʶʥʮ ʤʸʤʦʠ . ʭʩʮʩʠʺʮ ʭʩʲʶʮʠ ʨʥʷʰʬ ʹʸʣʩʤʬ ʩʥʹʲ ʹʮʺʹʮʹ , ʤʦ ʤʸʷʮʡʥ SensArray Π Automation FOUP Model Number: AF120 FCC ID: QTA-AF120 Contains FCC ID: 2ABCB-RPI3BP R-C-1KT-AF120 ‹ This device complies with part 15 of the FCC Rules. Operation is subject to the following two conditions: (1) This device may not cause harmful interference, and (2) This device must acceptany interference received, including interference that may cause undesired operation. ଥк۴ה̛̛Е ࣸࡈࡋ ݦ୐ ࢇ۽ɼМ ࡸ࢑

EUT Photo-Internal View EUT – Uncover View PCB1 Front View PCB1 Rear View PCB2 Front View PCB2 Rear View PCB3 Front View PCB3 Rear View PCB4 Front View PCB4 Rear View PCB5 Front View PCB5 Rear View PCB6 Front View PCB6 Rear View PCB7 Front View PCB7 Rear View PCB8 Front View PCB8 Rear View Adapter View

775 Montague Expressway, Milpitas, CA 95035, USA • Phone: (+1) 408 526 1188 • Facsimile (+1) 408 526 1088 Visit us at: www.siemic.com; Follow us at: Report No.: FCC_IC_SL18121801-KLA-021-AF120-DTS_Rev3.0 Supersede Report No.: FCC_IC_SL18121801-KLA-021-AF120-DTS Rev2.0 Applicant : KLA Corporation Product Name : SensArray®Automation FOUP Model No. : AF120 Test Standard : 47 CFR 15.247 RSS 247 Iss 2: Feb 2017 Test Method : ANSI C63.10: 2013 RSS Gen Iss 5: Apr 2018 558074 D01 DTS Meas Guidance v05r01 FCC ID : QTA-AF120 IC : 10516A-AF120 Dates of test : 03/01/2019 – 03/10/2019 Issue Date : 03/30/2020 Test Result : ☒ Pass ☐ Fail Equipment complied with the specification [X] Equipment did not comply with the specification [ ] This Test Report is Issued Under the Authority of: Cipher Chen Ge Test Engineer Engineer Reviewer Issued By: SIEMIC Laboratories 775 Montague Expressway, Milpitas, 95035 CA RF TEST REPORT Test report No. FCC_IC_SL18121801-KLA-021-AF120-DTS_Rev3.0 Page 2 of 56 775 Montague Expressway, Milpitas, CA 95035, USA • Phone: (+1) 408 526 1188 • Facsimile (+1) 408 526 1088 Visit us at: www.siemic.com; Follow us at: Laboratory Introduction SIEMIC, headquartered in the heart of Silicon Valley, with superior facilities in US and Asia, is one of the leading independent testing and certification facilities providing customers with one-stop shop services for Compliance Testing and Global Certifications. In addition to testing and certification, SIEMIC provides initial design reviews and compliance management throughout a project. Our extensive experience with China, Asia Pacific, North America, European, and International compliance requirements, assures the fastest, most cost effective way to attain regulatory compliance for the global markets. Accreditations for Conformity Assessment Country/Region Accreditation Body Scope USA FCC, A2LA EMC, RF/Wireless, Telecom Canada IC, A2LA, NIST EMC, RF/Wireless, Telecom Taiwan BSMI, NCC, NIST EMC, RF, Telecom, Safety Hong Kong OFTA, NIST RF/Wireless, Telecom Australia NATA, NIST EMC, RF, Telecom, Safety Korea KCC/RRA, NIST EMI, EMS, RF, Telecom, Safety Japan VCCI, JATE, TELEC, RFT EMI, RF/Wireless, Telecom Mexico NOM, COFETEL, Caniety Safety, EMC, RF/Wireless, Telecom Europe A2LA, NIST EMC, RF, Telecom, Safety Israel MOC, NIST EMC, RF, Telecom, Safety Accreditations for Product Certifications Country Accreditation Body Scope USA FCC TCB, NIST EMC, RF, Telecom Canada IC FCB, NIST EMC, RF, Telecom Singapore iDA, NIST EMC, RF, Telecom EU NB EMC & R&TTE Directive Japan MIC (RCB 208) RF, Telecom Hong Kong OFTA (US002) RF, Telecom Test report No. FCC_IC_SL18121801-KLA-021-AF120-DTS_Rev3.0 Page 3 of 56 775 Montague Expressway, Milpitas, CA 95035, USA • Phone: (+1) 408 526 1188 • Facsimile (+1) 408 526 1088 Visit us at: www.siemic.com; Follow us at: CONTENTS 1 REPORT REVISION HISTORY ....................................................................................................................................... 4 2 EXECUTIVE SUMMARY ................................................................................................................................................. 5 3 CUSTOMER INFORMATION .......................................................................................................................................... 5 4 TEST SITE INFORMATION ............................................................................................................................................ 5 5 MODIFICATION ............................................................................................................................................................. 5 6 EUT INFORMATION ...................................................................................................................................................... 6 6.1 EUT Description ........................................................................................................................................................ 6 6.2 Radio Description ...................................................................................................................................................... 6 7 SUPPORTING EQUIPMENT/SOFTWARE AND CABLING DESCRIPTION ......................................................................... 7 7.1 Supporting Equipment ............................................................................................................................................... 7 7.2 Cabling Description ................................................................................................................................................... 7 7.3 Test Software Description .......................................................................................................................................... 7 8 TEST SUMMARY ........................................................................................................................................................... 8 9 MEASUREMENT UNCERTAINTY ................................................................................................................................... 9 9.1 Emissions (30MHz to 1GHz)....................................................................................................................................... 9 9.2 Radiated Emissions (1GHz to 40GHz) ......................................................................................................................... 9 9.3 RF conducted measurement..................................................................................................................................... 10 10 MEASUREMENTS, EXAMINATION AND DERIVED RESULTS .................................................................................. 11 10.1 Conducted Emissions .......................................................................................................................................... 11 10.2 6dB & 99% Bandwi…

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Report No.: FCC_IC_SL18121801-KLA-021-Co-location Rev_1.0 Page No. 1 / 24 Report Format Version: 6.1.1 FCC IC Test Report Report No.: FCC_IC_SL18121801-KLA-021-Co-location Rev_1.0 FCC ID: QTA-AF120 IC: 10516A-AF120 Test Model: AF120 2.4GHz WiFi Module FCC ID: 2ABCB-RPI3BP 2.4GHz WiFi Module Model: Raspberry Pi 3 Model B+ Received Date: 03/13/2019 Test Date: 03/13/2019 and 02/21/2020 Issued Date: 02/28/2020 Applicant: KLA Corporation Address: One Technology Drive, Milpitas, CA 95035 Issued By: Bureau Veritas Consumer Products Services, Inc. Lab Address: 775 Montague Expressway, Milpitas, CA 95035, USA Test Location (1): 775 Montague Expressway, Milpitas, CA 95035, USA FCC Registration / Designation Number: 540430/4842D This report is for your exclusive use. Any copying or replication of this report to or for any other person or entity, or use of our name or trademark, is permitted only with our prior written permission. This report sets forth our findings solely with respect to the test samples identified herein. The results set forth in this report are not indicative or representative of the quality or characteristics of the lot from which a test sample was taken or any similar or identical product unless specifically and expressly noted. Our report includes all of the tests requested by you and the results thereof based upon the information that you provided to us. You have 60 days from date of issuance of this report to notify us of any material error or omission caused by our negligence, provided, however, that such notice shall be in writing and shall specifically address the issue you wish to raise. A failure to raise such issue within the prescribed time shall constitute your unqualified acceptance of the completeness of this report, the tests conducted and the correctness of the report contents. Unless specific mention, the uncertainty of measurement has been explicitly taken into account to declare the compliance or non-compliance to the specification. The report must not be used by the client to claim product certification, approval, or endorsement by A2LA or any government agencies. Report No.: FCC_IC_SL18121801-KLA-021-Co-location Rev_1.0 Page No. 2 / 24 Report Format Version: 6.1.1 Table of Contents Release Control Record .................................................................................................................................. 3 1 Certificate of Conformity ...................................................................................................................... 4 2 Summary of Test Results ..................................................................................................................... 5 2.1 Measurement Uncertainty ................................................................................................................... 5 2.2 Modification Record ............................................................................................................................ 5 3 General Information .............................................................................................................................. 6 3.1 General Description of EUT ................................................................................................................ 6 3.2 Description of Test Modes ................................................................................................................... 7 3.2.1 Test Mode Applicability and Tested Channel Detail ............................................................................. 8 3.3 Description of Support Units ............................................................................................................... 9 3.3.1 Configuration of System under Test .................................................................................................... 9 4 Test Types and Results ....................................................................................................................... 11 4.1 Radiated Emission Measurement ...................................................................................................... 11 4.1.1 Limits of Radiated Emission Measurement ........................................................................................ 11 4.1.2 Test Instruments ................................................................................................................................ 12 4.1.3 Test Procedures ................................................................................................................................. 13 4.1.4 Deviation from Test Standard ............................................................................................................ 14 4.1.5 Test Setup .......................................................................................................................................... 14 4.1.6 EUT Operating Conditions ................................................................................................................. 16 4.1.7 Test Results ....................................................................................................................................... 17 4.2 Conducted Emission Measurement .................................................................................................. 19 4.2.1 Limits of Conducted Emission Measurement .................................................................................... 19 4.2.2 Test Instruments ................................................................................................................................ 19 4.2.3 Test Procedures ................................................................................................................................. 20 4.2.4 Deviation from Test Standard ............................................................................................................ 20 4.2.5 Test Setup ...................................…

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Setup Photo View Radiated Emission Test below 30MHz Front View Radiated Emission Test below 30MHz Rear View Radiated Emission Test below 1GHz Front View Radiated Emission Test below 1GHz Rear View Conducted Emission Test Front View Conducted Emission Test Rear View