QTA-SCLCRF CARRIER STATION LARGE COIL

Rev.00 EtchTemp Low Temperature (ET LT) Wafer User Manual KLA SensArray ® 7 T echnology Drive. Milpitas, CA 95035 Phone : 1-408-875-1203 Fax : 1-408-352-2828 [email protected] www.kla-tencor.com Copyright © 2021 by KLA. All rights reserved worldwide. No parts of this publication may be reproduced, modified, transmitted, transcribed, stored in retrieval systems, or translated into any human or computer language, in any form or by any means, electronic, mechanical, magnetic, chemical, manual, or otherwise, without the express written permission of KLA, One Technology Drive, Milpitas, California 95035. KLA may revise this document at any time without notice. KLA Confidential SensArray ET LT Wafer User Manual 2 Restricted Distribution T his manual applies to EtchTemp Low Temperature ( ET LT) Wafer only. EtchTemp Low Temperature (ET LT) Wafer is trademark of KLA SensArray. KLA reserves the right to modify, change, or improve any or all specifications published in this document without notice. KLA Confidential SensArray ET LT Wafer User Manual 3 Restricted Distribution Important Notices Warranty EtchTemp Low Temperature (ET LT) Wafer System Hardware KLA warrants that the EtchTemp Low Temperature (ET LT) Wafer Systems (Products) sold will be free from defects in material and workmanship and perform to KLA’s applicable published specifications for a period of 6 months after shipment. ET LT wafer is warranted for 6 months from date of shipment, 4 measurement hours, or consumption (whichever comes first) for failures caused by component and assembly defects. Refer to the specification provided with your wafer for the exact warranty terms. The liability of KLA hereunder shall be limited to replacing or repairing, at its option, any defective Products that are returned Free on Board (FOB) to KLA SensArray division plant in Milpitas, CA. In no case are Products to be returned without the purchaser first obtaining SensArray’s permission and Returned Materials Authorization (RMA) number. In no event shall SensArray be liable for any consequential or incidental damages. Products that have been subject to abuse, misuse, accident, alteration, neglect, improper storage, or unauthorized repair or installation are not covered by this warranty. SensArray will make the final determination as to the existence and cause of any alleged defect. SensArray is not responsible for maintaining or supplying any consumable materials used in conjunction with this hardware. No warranty is made with respect to any customized equipment or Products supplied with ET LT Wafer systems where produced to Purchaser’s specifications except as specifically stated in writing by SensArray in the contract for such Products. The purchaser will pay the shipping costs of returned materials to SensArray; SensArray will pay the cost of shipping repaired/replaced material to Purchaser. This Warranty is the only warranty made by SensArray with respect to the Product delivered hereunder and may be modified only by a written instrument that is signed by a duly authorized officer of SensArray and accepted by Purchaser. Except as provided above, SensArray makes no warrantees, expressed or implied, including any warranty of merchantability for a particular purpose. Software KLA (SensArray division) warrants that (a) SensArray Tools software (Software) will perform substantially in accordance with the accompanying written materials for a period of 12 months after shipment, and (b) the medium on which the Software is recorded will be free from defects in materials and workmanship under normal use and service for a period of 12 months after shipment. Faults caused by unauthorized modification, misuse or abuse of products, or problems due to software not supplied by SensArray, are not covered by this Warranty. During the Warranty Period, the purchaser may return failed Software to SensArray for repair or replacement, at SensArray’s option. SensArray does not warrant that the operation of the Software shall be uninterrupted or error free. The purchaser will first notify SensArray of the nature of the problem and obtain a Returned Materials Authorization [RMA] number. The purchaser will pay the costs of shipping returned Software to SensArray; SensArray will pay the cost of shipping repaired/replaced Software to the purchaser. No other warranty is expressed or implied. SensArray specifically disclaims the implied warranty of merchantability and fitness for a specific application. The SensArray Tools Software Documentation Materials (Documentation) are subject to revision and change without notice. SensArray agrees to make a best effort attempt to keep the purchaser advised of changes to the Documentation. KLA Confidential SensArray ET LT Wafer User Manual 4 Restricted Distribution Software License Agreement The Software is owned by KLA (SensArray division) and is protected by United States copyright laws and international treaty provisions. Therefore, you must treat the Software like any other copyrighted material. Under the Copyright Laws, SensArray Tools Software, or accompanying written materials, may not be copied, photo-copied, reproduced, translated, in whole or in part, without the prior written permission of SensArray. You may make one copy of the Software solely for backup or archival purposes. Third-Party Software Licenses for any software which was provided but not produced by SensArray are granted solely and only by the original supplier or manufacturer and solely and only with the supplier’s limitations and rights. Copying restrictions for such software are governed solely and only by the original supplier or manufacturer’s license or any other supplier- approved agreements, as applicable. Regulatory Information This equipment has been tested and found to comply with the limits for a Class B digital device, pursuant to part 15 of the FCC Rules. This equipment complies with FCC radiation exposure limits set forth for a…

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Rev 2/6/2023 Federal Communications Commission Authorization and Evaluation Division 7435 Oakland Mills Road Columbia, MD 21046 USA Date: 03-01-2023 FCC ID: (QTA-SCLC) Ref. #1: Attestation Statements Part 2.911(d)(5)(i) Filing [KLA Corporation] (“the applicant”) certifies that the equipment for which authorization is sought is not “covered” equipment prohibited from receiving an equipment authorization pursuant to section 2.903 of the FCC rules. Ref. #2: Attestation Statements Part 2.911(d)(5)(ii) Filing [KLA Corporation] (“the applicant”) certifies that, as of the date of the filing of the application, the applicant [ is not] identified on the Covered List as an entity producing “covered” equipment. Cover List Link: (https://www.fcc.gov/supplychain/coveredlist) Sincerely, Applicant: KLA Corporation Address: 7 Technology Dr, Milpitas, CA 95035 Contact Person: Giampietro Bieli (Authorized representative of SensArray Division, KLA Corporation) Tel.: +1(408) 875-2719 Email: [email protected]

Rev 2/6/2023 Federal Communications Commission Authorization and Evaluation Division 7435 Oakland Mills Road Columbia, MD 21046 USA Date of Filing to TCB: 07-05-2022 Ref: Attestation Statements Part 2.911(d)(7) Filing [KLA Corporation] (“the applicant”) certifies that, as of the date of the filing of the application, [KLA Corporation] is our designated U.S. agent for service of process for the above referenced FCC ID. [KLA Corporation] accepts to maintain an agent for no less than one year after the grantee has terminated all marketing and importation or the conclusion of any Commission-related proceeding involving the equipment and will notify the TCB/FCC in a timely manner if the US Processing Agent changes. [KLA Corporation] accepts, as of the date of the filing of the application, the obligation of the designated U.S. agent for service of process for the above referenced FCC ID. Designated U.S. Agent Information: Name: KLA Corporation FRN: 0016888653 Address: 7 Technology Dr, Milpitas, CA 95035 Contact Person: Giampietro Bieli Tel.: +1(408) 875-2719 Email: [email protected] Sincerely, KLA Corporation Inc. Giampietro Bieli KLA Corporation Inc. Giampietro Bieli

Corporate Office  One Technology Drive  Milpitas, CA 95035  www.kla.com August 22,2022 Limited Power of Attorney To whom it may concern, Please be advised that the undersigned, Brian Haas of KLA Corporation (“KLA”) is lawfully authorized to represent and act on behalf of the said company, whose registered address is One Technology Drive, Milpitas California 95035 and does hereby appoint, Giampietro Bieli, General Manager of KLA’s SensArray Division, to act on behalf of KLA strictly as may be necessary in connection with the completion, submission, and execution of all documentation and fulfillment of all processes required by the Federal Communications Commission (“FCC”) and in support of FCC registration and approval of SensArray products in compliance with all laws, directives, and regulations of the country where SensArray products are sold, including but not limited to, electromagnetic compatibility, equipment RF communication authorization, and product safety (the “SensArray Product Compliance Project”). The applicant further certifies that neither it nor any party named in this Limited Power of Attorney is subject to a denial of federal benefits that includes FCC benefits pursuant to Section 5301 of the Anti-Drug Abuse Act of 1988, 21 U.S.C. 862. This Limited Power of Attorney is limited to the SensArray Product Compliance Project specifically set forth herein and shall not in any way be considered or construed as a general power of attorney. This power commences upon the date hereof and shall continue until revoked in writing by an authorized representative of KLA Corporation. If there are any questions regarding this Limited Power of Attorney, please contact Brian Haas of KLA Corporation directly via email at [email protected] or +1(408) 875-0488. Sincerely, Brian L. Haas, PhD Vice-President, Central Engineering KLA Corporation, Global Products Group

SensArray ® Storage Case LC 300 Model Number: FCC ID: QTA-SCLC KC ID: R-R-1KT-SCLC300 © . This device complies with part 15 of the FCC Rules. Operation is subject to the following two conditions: (1) This device may not cause harmful interference, and (2) This device must acceptany interference received, including interference that may cause undesired operation. אזהרה מוצר זה הוא מוצרA CLASS בסביבה ביתית, מוצר זה עלול לגרום להפרעות בתדר רדיו ובמקרה זה, המשתמש עשוי להידרש לנקוט אמצעים מתאימים. אזהרה מוצר זה הוא מוצרA CLASS בסביבה ביתית, מוצר זה עלול לגרום להפרעות בתדר רדיו ובמקרה זה, המשתמש עשוי להידרש לנקוט אמצעים מתאימים. 해당무선기기는 운용중 혼선 가능성이 있음 SCLC300

SensArray ® Storage Case LC 200 Model Number: FCC ID: QTA-SCLC KC ID: R-R-1KT-SCLC200 © . This device complies with part 15 of the FCC Rules. Operation is subject to the following two conditions: (1) This device may not cause harmful interference, and (2) This device must acceptany interference received, including interference that may cause undesired operation. אזהרה מוצר זה הוא מוצרA CLASS בסביבה ביתית, מוצר זה עלול לגרום להפרעות בתדר רדיו ובמקרה זה, המשתמש עשוי להידרש לנקוט אמצעים מתאימים. אזהרה מוצר זה הוא מוצרA CLASS בסביבה ביתית, מוצר זה עלול לגרום להפרעות בתדר רדיו ובמקרה זה, המשתמש עשוי להידרש לנקוט אמצעים מתאימים. 해당무선기기는 운용중 혼선 가능성이 있음 SCLC200

FCC Designation No: US1109 FCC Reg No: 540430 CAB Identifier: 4842D TEST REPORT Issued By: Bureau Veritas Consumer Products Services, Inc. Test Location/Lab Address: 775 Montague Expy, Milpitas, CA 95035 RF Exposure Report Report No.: FCC_RF Exposure_SL20031301-KLA-003 Rev 4.0 FCC ID: QTA-SCLC Test Model(s): SCLC300 Series Model No.: SCLC200/SCLC300 Received Date: 03/10/2020 Test Date: 04/06/2020 Issued Date: 01/26/2023 Applicant: KLA Corporation Address: 1 Technology Dr, Milpitas, CA 95035 Manufacturer: KLA Corporation Address: 1 Technology Dr, Milpitas, CA 95035 Issued By: Bureau Veritas Consumer Products Services, Inc. Lab Address: 775 Montague Expressway Milpitas, CA, 95035, USA FCC Registration / Designation Number: 540430 This report is for your exclusive use. Any copying or replication of this report to or for any other person or entity, or use of our name or trademark, is permitted only with our prior written permission. This report sets forth our findings solely with respect to the test samples identified herein. The results set forth in this report are not indicative or representative of the quality or characteristics of the lot from which a test sample was taken or any similar or identical product unless specifically and expressly noted. Our report includes all of the tests requested by you and the results thereof based upon the information that you provided to us. You have 60 days from date of issuance of this report to notify us of any material error or omission caused by our negligence, provided, however, that such notice shall be in writing and shall specifically address the issue you wish to raise. A failure to raise such issue within the prescribed time shall constitute your unqualified acceptance of the completeness of this report, the tests conducted and the correctness of the report contents. Unless specific mention, the uncertainty of measurement has been explicitly taken into account to declare the compliance or non-compliance to the specification. The report must not be used by the client to claim product certification, approval, or endorsement by A2LA or any government agencies. Report No.: FCC_RF Exposure_SL20031301-KLA-003 Rev 4.0 Page No. 2 / 15 Report Format Version: 6.1.1 Table of Contents Release Control Record .................................................................................................................................. 3 1 Certificate of Conformity ...................................................................................................................... 4 2 General Information .............................................................................................................................. 5 2.1 General Description of EUT ................................................................................................................ 5 3 Nerve Stimulation Exposure .................................................................... Error! Bookmark not defined. 3.1 Description of Support Units ............................................................................................................... 6 3.2 Configuration of System under Test .................................................................................................... 6 3.3 Test Setup ........................................................................................................................................... 6 3.4 Test Instruments .................................................................................................................................. 7 4 Limit for Maximum Pecrmissible Exposure (MPE) ............................................................................ 8 5 Test Point Description .......................................................................................................................... 9 6 Calculation Result of Maximum Conducted Power ......................................................................... 10 Appendix A: Pictures of Test Arrangements .............................................................................................. 12 Appendix B: Information of the Testing Laboratories ............................................................................... 13 Appendix C: Declaration of Model Differences Letter ............................................................................... 14 Report No.: FCC_RF Exposure_SL20031301-KLA-003 Rev 4.0 Page No. 3 / 15 Report Format Version: 6.1.1 Release Control Record Issue No. Description Date Issued FCC_RF Exposure_SL20031301-KLA-003 Orignal Release 04/07/2020 FCC_RF Exposure_SL20031301-KLA-003 Rev 1.0 Updated model number 05/12/2020 FCC_RF Exposure_SL20031301-KLA-003 Rev 2.0 Updated model number 06/11/2020 FCC_RF Exposure_SL20031301-KLA-003 Rev 3.0 Updated model number, section 4, and evaluation method 12/06/2022 FCC_RF Exposure_SL20031301-KLA-003 Rev 4.0 Updated product description and description of test modes 01/26/2023 Report No.: FCC_RF Exposure_SL20031301-KLA-003 Rev 4.0 Page No. 4 / 15 Report Format Version: 6.1.1 1 Certificate of Conformity Product: RF Large Coil Carrier Station Brand: KLA SensArray Test Model(s): SCLC300 Series Model No.: SCLC200/SCLC300 Sample Status: Product Validation Applicant: KLA Corporation Test Date: 04/06/2020 Standards: FCC Part 1 (Section 1.1307(b), 1.1310) FCC Part 2 (Section 2.1091) KDB 680106 D01 RF Exposure Wireless Charging App v03: The above equipment has been tested by Bureau Veritas Consumer Products Services, Inc., Milpitas Branch, and found compliance with the requirement of the above standards. The test record, data evaluation & Equipment Under Test (EUT) configurations represented herein are true and accurate accounts of the measurements of the sample’s EMC characteristics under the conditions specified in this report. Prepared by : , Date: 06/11/2020 Deon Dai / Test Engineer Approved by : , Date: 06/11/2020 Chen Ge / Engineer Reviewer Report No.: FCC_RF Exposure_SL2…

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Revision-AA Antenna Specification for Large Coil Wafers Page 1 of 3 KLA Corporation- SensArray Title: Revision Number: Antenna Specification for Large Coil Wafers, Carrier Stations, Storage Cases AA Process Owner: Engineering 1.0 Table of Contents 1.Table of Contents..........................................................................................................................................................1 2.Purpose......................................................................................................................................................................1 3.Scope........................................................................................................................................................................1 4.Reference Materials........................................................................................................................................................1 5.Definitions..................................................................................................................................................................2 6.Antenna Specifications....................................................................................................................................................2 7.Picture of Antenna Coil....................................................................................................................................................3 2.0 Purpose This document provides an antenna specification of models in reference material. 3.0 Scope This document describes antenna specification for large coil wafers. 4.0 Reference Material Large Coil Wafers: Model Name Model Number EtchTemp HD ETHD EtchTemp HP ETHP EtchTemp LT ETLT EtchTemp LC ETLC HighTemp 200 HT200 KLA Confidential Revision-AA Antenna Specification for Large Coil Wafers Page 2 of 3 HighTemp 300 HT300 UVi 300 UV300 Integrated 2 300 IW2-300 Carrier Stations, Storage Cases: Model Name Model Number Carrier Station LC 300 CSLC300 Carrier Station LC 200 CSLC200 Storage Case LC 300 SCLC300 Storage Case LC 200 SCLC200 5.0 Definitions N/A 6.0 Antenna Specifications Antenna type: Near Field Magnetic Loop Antenna Antenna coil diameters: Loop antenna coil diameters: 2 inches Number of coils: 1 Number of turns: 10 Modulation Method: backscatter modulation-OOK Pattern: Cardioid Loop pattern Inductance: 10uH KLA Confidential Revision-AA Antenna Specification for Large Coil Wafers Page 3 of 3 7.0 Picture of Antenna Coil 7.1 Front view 7.2 Back view KLA Confidential

FCC Designation No: US1109 FCC Reg No: 540430 CAB Identifier: US0160 TEST REPORT Issued By: Bureau Veritas Consumer Products Services, Inc. Test Location/Lab Address: 775 Montague Expy, Milpitas, CA 95035 FCC Test Report Report No.: FCC_RF_SL20031301-KLA-003 Rev 4.0 FCC ID: QTA-SCLC Test Model(s): SCLC300 Series Model No.: SCLC200/SCLC300 Received Date: 03/10/2020 Test Date: 03/22/2020/-03/27/2020 Issued Date: 01/25/2023 Applicant: KLA Corporation Address: 1 Technology Dr, Milpitas, CA 95035 Manufacturer: KLA Corporation Address: 1 Technology Dr, Milpitas, CA 95035 Issued By: Bureau Veritas Consumer Products Services, Inc. Lab Address: 775 Montague Expressway, Milpitas, CA 95035 Test Location (1): 775 Montague Expressway, Milpitas, CA 95035 FCC Registration / Designation Number: 540430 ISED# / CAB identifier: 4842D This report is for your exclusive use. Any copying or replication of this report to or for any other person or entity, or use of our name or trademark, is permitted only with our prior written permission. This report sets forth our findings solely with respect to the test samples identified herein. The results set forth in this report are not indicative or representative of the quality or characteristics of the lot from which a test sample was taken or any similar or identical product unless specifically and expressly noted. Our report includes all of the tests requested by you and the results thereof based upon the information that you provided to us. You have 60 days from date of issuance of this report to notify us of any material error or omission caused by our negligence, provided, however, that such notice shall be in writing and shall specifically address the issue you wish to raise. A failure to raise such issue within the prescribed time shall constitute your unqualified acceptance of the completeness of this report, the tests conducted and the correctness of the report contents. Unless specific mention, the uncertainty of measurement has been explicitly taken into account to declare the compliance or non-compliance to the specification. The report must not be used by the client to claim product certification, approval, or endorsement by A2LA or any government agencies. Report No.: FCC_RF_SL20031301-KLA-003 Rev 4.0 Page No. 2 / 16 Report Format Version: 6.1.1 Table of Contents Release Control Record .................................................................................................................................. 3 1 Certificate of Conformity ...................................................................................................................... 4 2 Summary of Test Results ..................................................................................................................... 5 2.1 Measurement Uncertainty ................................................................................................................... 5 2.2 Modification Record ............................................................................................................................ 5 3 General Information .............................................................................................................................. 6 3.1 General Description of EUT ................................................................................................................ 6 3.2 Description of Test Modes ................................................................................................................... 7 3.2.1 1 channel is provided to this EUT ........................................................................................................ 7 3.3 Description of Support Units ............................................................................................................... 7 3.4 General Description of Applied Standards .......................................................................................... 7 4 Test Types and Results ........................................................................................................................ 8 4.1 Radiated Emission Measurement ....................................................................................................... 8 4.1.1 Limits of Radiated Emission Measurement ......................................................................................... 8 4.1.2 Test Instruments .................................................................................................................................. 8 4.1.3 Test Procedures ................................................................................................................................... 9 4.1.4 Deviation from Test Standard .............................................................................................................. 9 4.1.5 Test Setup .......................................................................................................................................... 10 4.1.6 EUT Operating Conditions ................................................................................................................. 10 4.1.7 Test Results ........................................................................................................................................ 11 Appendix A: Information on the Testing Laboratories .............................................................................. 14 Appendix B – Declaration of Model Differences Letter ............................................................................. 15 Report No.: FCC_RF_SL20031301-KLA-003 Rev 4.0 Page No. 3 / 16 Report Format Version: 6.1.1 Release Control Record Issue No. Description Date Issued FCC_RF_SL20031301-KLA-003 Initial Release 03/29/2020 FCC_RF_SL20031301-KLA-003 Rev 1.0 Updated model number 05/12/2020 FCC_RF_SL20031301-KLA-003 Rev 2.0 Updated model number 06/11/2020 FCC_RF_SL20031301-KLA-003 Rev 3.0 Updated model number 12/07/2022 FCC_RF_SL20031301-…

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Setup Photo View Radiated Emission Test below 30MHz Front View Radiated Emission Test below 30MHz Rear View Radiated Emission Test below 1GHz Front View Radiated Emission Test below 1GHz Rear View