QTA-CSLCRF CARRIER STATION LARGE COIL

Rev.00 EtchTemp Low Temperature (ET LT) Wafer User Manual KLA SensArray ® 7 T echnology Drive. Milpitas, CA 95035 Phone : 1-408-875-1203 Fax : 1-408-352-2828 [email protected] www.kla-tencor.com Copyright © 2021 by KLA. All rights reserved worldwide. No parts of this publication may be reproduced, modified, transmitted, transcribed, stored in retrieval systems, or translated into any human or computer language, in any form or by any means, electronic, mechanical, magnetic, chemical, manual, or otherwise, without the express written permission of KLA, One Technology Drive, Milpitas, California 95035. KLA may revise this document at any time without notice. KLA Confidential SensArray ET LT Wafer User Manual 2 Restricted Distribution T his manual applies to EtchTemp Low Temperature ( ET LT) Wafer only. EtchTemp Low Temperature (ET LT) Wafer is trademark of KLA SensArray. KLA reserves the right to modify, change, or improve any or all specifications published in this document without notice. KLA Confidential SensArray ET LT Wafer User Manual 3 Restricted Distribution Important Notices Warranty EtchTemp Low Temperature (ET LT) Wafer System Hardware KLA warrants that the EtchTemp Low Temperature (ET LT) Wafer Systems (Products) sold will be free from defects in material and workmanship and perform to KLA’s applicable published specifications for a period of 6 months after shipment. ET LT wafer is warranted for 6 months from date of shipment, 4 measurement hours, or consumption (whichever comes first) for failures caused by component and assembly defects. Refer to the specification provided with your wafer for the exact warranty terms. The liability of KLA hereunder shall be limited to replacing or repairing, at its option, any defective Products that are returned Free on Board (FOB) to KLA SensArray division plant in Milpitas, CA. In no case are Products to be returned without the purchaser first obtaining SensArray’s permission and Returned Materials Authorization (RMA) number. In no event shall SensArray be liable for any consequential or incidental damages. Products that have been subject to abuse, misuse, accident, alteration, neglect, improper storage, or unauthorized repair or installation are not covered by this warranty. SensArray will make the final determination as to the existence and cause of any alleged defect. SensArray is not responsible for maintaining or supplying any consumable materials used in conjunction with this hardware. No warranty is made with respect to any customized equipment or Products supplied with ET LT Wafer systems where produced to Purchaser’s specifications except as specifically stated in writing by SensArray in the contract for such Products. The purchaser will pay the shipping costs of returned materials to SensArray; SensArray will pay the cost of shipping repaired/replaced material to Purchaser. This Warranty is the only warranty made by SensArray with respect to the Product delivered hereunder and may be modified only by a written instrument that is signed by a duly authorized officer of SensArray and accepted by Purchaser. Except as provided above, SensArray makes no warrantees, expressed or implied, including any warranty of merchantability for a particular purpose. Software KLA (SensArray division) warrants that (a) SensArray Tools software (Software) will perform substantially in accordance with the accompanying written materials for a period of 12 months after shipment, and (b) the medium on which the Software is recorded will be free from defects in materials and workmanship under normal use and service for a period of 12 months after shipment. Faults caused by unauthorized modification, misuse or abuse of products, or problems due to software not supplied by SensArray, are not covered by this Warranty. During the Warranty Period, the purchaser may return failed Software to SensArray for repair or replacement, at SensArray’s option. SensArray does not warrant that the operation of the Software shall be uninterrupted or error free. The purchaser will first notify SensArray of the nature of the problem and obtain a Returned Materials Authorization [RMA] number. The purchaser will pay the costs of shipping returned Software to SensArray; SensArray will pay the cost of shipping repaired/replaced Software to the purchaser. No other warranty is expressed or implied. SensArray specifically disclaims the implied warranty of merchantability and fitness for a specific application. The SensArray Tools Software Documentation Materials (Documentation) are subject to revision and change without notice. SensArray agrees to make a best effort attempt to keep the purchaser advised of changes to the Documentation. KLA Confidential SensArray ET LT Wafer User Manual 4 Restricted Distribution Software License Agreement The Software is owned by KLA (SensArray division) and is protected by United States copyright laws and international treaty provisions. Therefore, you must treat the Software like any other copyrighted material. Under the Copyright Laws, SensArray Tools Software, or accompanying written materials, may not be copied, photo-copied, reproduced, translated, in whole or in part, without the prior written permission of SensArray. You may make one copy of the Software solely for backup or archival purposes. Third-Party Software Licenses for any software which was provided but not produced by SensArray are granted solely and only by the original supplier or manufacturer and solely and only with the supplier’s limitations and rights. Copying restrictions for such software are governed solely and only by the original supplier or manufacturer’s license or any other supplier- approved agreements, as applicable. Regulatory Information This equipment has been tested and found to comply with the limits for a Class B digital device, pursuant to part 15 of the FCC Rules. This equipment complies with FCC radiation exposure limits set forth for a…

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Rev 2/6/2023 Federal Communications Commission Authorization and Evaluation Division 7435 Oakland Mills Road Columbia, MD 21046 USA FCC ID: QTA-CSLC Date of Filing to TCB: 07-24-2023 Ref: Attestation Statements Part 2.911(d)(7) Filing [KLA Corporation] (“the applicant”) certifies that, as of the date of the filing of the application, [KLA Corporation] is our designated U.S. agent for service of process for the above referenced FCC ID. [KLA Corporation] accepts to maintain an agent for no less than one year after the grantee has terminated all marketing and importation or the conclusion of any Commission-related proceeding involving the equipment and will notify the TCB/FCC in a timely manner if the US Processing Agent changes. [KLA Corporation] accepts, as of the date of the filing of the application, the obligation of the designated U.S. agent for service of process for the above referenced FCC ID. Designated U.S. Agent Information: Name: KLA Corporation FRN: 0016888653 Address: 1 Technology Dr, Milpitas, CA 95035 Contact Person: Brian L. Haas Tel.: +1(408) 875-0488 Email: [email protected] Sincerely, Applicant: KLA Corporation Applicant Contact Name: Brian L. Haas Applicant Contact Signature: US Local Agent: KLA Corporation US Local Agent Contact Name: Brian L. Haas US Local Agent Contact Signature:

Rev 2/6/2023 Federal Communications Commission Authorization and Evaluation Division 7435 Oakland Mills Road Columbia, MD 21046 USA Date: 03-01-2023 FCC ID: (QTA-CSLC) Ref. #1: Attestation Statements Part 2.911(d)(5)(i) Filing [KLA Corporation] (“the applicant”) certifies that the equipment for which authorization is sought is not “covered” equipment prohibited from receiving an equipment authorization pursuant to section 2.903 of the FCC rules. Ref. #2: Attestation Statements Part 2.911(d)(5)(ii) Filing [KLA Corporation] (“the applicant”) certifies that, as of the date of the filing of the application, the applicant [ is not] identified on the Covered List as an entity producing “covered” equipment. Cover List Link: (https://www.fcc.gov/supplychain/coveredlist) Sincerely, Applicant: KLA Corporation Address: 7 Technology Dr, Milpitas, CA 95035 Contact Person: Giampietro Bieli (Authorized representative of SensArray Division, KLA Corporation) Tel.: +1(408) 875-2719 Email: [email protected]

KLA Corporation  One Technology Drive  Milpitas, CA 95035  www.kla.com Declaration of Model Differences Letter Applicant: KLA SensArray Product name: RF Large Coil Carrier Station Brand: KLA SensArray Model: Model Name Model Number CARRIER STATION LC 300 CSLC300 CARRIER STATION LC 200 CSLC200 Please refer to model difference as below. Circuit board layout, component models are exactly the same. # Product Characteristics: Products are: Same Different 1 Radio Frequency Operating Range(s) X 2 RF Power / Field Strength X 3 Radio Frequency Circuitry X 4 Antenna Characteristics X 5 Associated Digital Circuitry X 6 Functional Capabilities X 7 Cosmetic/Dimension Differences X 8 Case Design/Materials X For any differences, a description is provided in the table below. # Description of differences: 1 CARRIER STATION LC 300 is based on 300mm diameter carrier station design, CARRIER STATION LC 200 is based on 200mm diameter carrier station design. 2 CARRIER STATION LC 200 is a modified design based on CARRIER STATION LC 300 with case design in different size, the same material. The difference between them impose no deviation in their RF aspect, and hence, there applies no change to RF test results KLA Corporation  One Technology Drive  Milpitas, CA 95035  www.kla.com Name and position: Lei Mei, Senior Electrical Design Engineer and Compliance Owner Name of Applicant: KLA SensArray Address: 7 Technology Drive. Milpitas, CA 95035

Corporate Office  One Technology Drive  Milpitas, CA 95035  www.kla.com August 22,2022 Limited Power of Attorney To whom it may concern, Please be advised that the undersigned, Brian Haas of KLA Corporation (“KLA”) is lawfully authorized to represent and act on behalf of the said company, whose registered address is One Technology Drive, Milpitas California 95035 and does hereby appoint, Giampietro Bieli, General Manager of KLA’s SensArray Division, to act on behalf of KLA strictly as may be necessary in connection with the completion, submission, and execution of all documentation and fulfillment of all processes required by the Federal Communications Commission (“FCC”) and in support of FCC registration and approval of SensArray products in compliance with all laws, directives, and regulations of the country where SensArray products are sold, including but not limited to, electromagnetic compatibility, equipment RF communication authorization, and product safety (the “SensArray Product Compliance Project”). The applicant further certifies that neither it nor any party named in this Limited Power of Attorney is subject to a denial of federal benefits that includes FCC benefits pursuant to Section 5301 of the Anti-Drug Abuse Act of 1988, 21 U.S.C. 862. This Limited Power of Attorney is limited to the SensArray Product Compliance Project specifically set forth herein and shall not in any way be considered or construed as a general power of attorney. This power commences upon the date hereof and shall continue until revoked in writing by an authorized representative of KLA Corporation. If there are any questions regarding this Limited Power of Attorney, please contact Brian Haas of KLA Corporation directly via email at [email protected] or +1(408) 875-0488. Sincerely, Brian L. Haas, PhD Vice-President, Central Engineering KLA Corporation, Global Products Group

SensArray ® Carrier Station LC 200 Model Number: FCC ID: QTA-CSLC KC ID: R-R-1KT-CSLC200 © . This device complies with part 15 of the FCC Rules. Operation is subject to the following two conditions: (1) This device may not cause harmful interference, and (2) This device must acceptany interference received, including interference that may cause undesired operation. אזהרה מוצר זה הוא מוצרA CLASS בסביבה ביתית, מוצר זה עלול לגרום להפרעות בתדר רדיו ובמקרה זה, המשתמש עשוי להידרש לנקוט אמצעים מתאימים. אזהרה מוצר זה הוא מוצרA CLASS בסביבה ביתית, מוצר זה עלול לגרום להפרעות בתדר רדיו ובמקרה זה, המשתמש עשוי להידרש לנקוט אמצעים מתאימים. 해당무선기기는 운용중 혼선 가능성이 있음 CSLC200

Antenna spec for RF Carrier Station for SA Wafer • Antenna model: KLA 05-2604_SA, Antenna name: COIL,STORAGE CASE 300,LARGE COIL WAFER,TESTED W/FERRIT, KLA • Coil diameters: inner diameter (ID) of coil is 45.6 mm (1.8 inch) and outer diameter (OD) of coil is 53.4 mm (2.1 inch) • Number of coils: 1 for RF Storage Case • Number of turns: 10 • RF Power level: Total power of RF carrier coil at resonance is 3.8 W, the communication power is 20% of total charging RF power which is 20% of 3.8W=0.76W • Current: Defaulted charge rate is 2.0mA • Distance between charger and receiver coils: 1.5mm

FCC Designation No: US1109 FCC Reg No: 540430 CAB Identifier: 4842D TEST REPORT Issued By: Bureau Veritas Consumer Products Services, Inc. Test Location/Lab Address: 775 Montague Expy, Milpitas, CA 95035 RF Exposure Report Report No.: FCC_RF Exposure_KLA_CSLC300_21040101_17April2023 FCC ID: QTA-CLSC Test Model(s): CSLC300 Series Model No.: CSLC200 Received Date: 02/24/2023 Test Date: 02/27/2023 Issued Date: 03/16/2023 Applicant: KLA Corporation Address: 1 Technology Dr, Milpitas, CA 95035 Manufacturer: KLA Corporation Address: 1 Technology Dr, Milpitas, CA 95035 Issued By: Bureau Veritas Consumer Products Services, Inc. Lab Address: 775 Montague Expressway Milpitas, CA, 95035, USA FCC Registration / Designation Number: 540430 This report is for your exclusive use. Any copying or replication of this report to or for any other person or entity, or use of our name or trademark, is permitted only with our prior written permission. This report sets forth our findings solely with respect to the test samples identified herein. The results set forth in this report are not indicative or representative of the quality or characteristics of the lot from which a test sample was taken or any similar or identical product unless specifically and expressly noted. Our report includes all of the tests requested by you and the results thereof based upon the information that you provided to us. You have 60 days from date of issuance of this report to notify us of any material error or omission caused by our negligence, provided, however, that such notice shall be in writing and shall specifically address the issue you wish to raise. A failure to raise such issue within the prescribed time shall constitute your unqualified acceptance of the completeness of this report, the tests conducted and the correctness of the report contents. Unless specific mention, the uncertainty of measurement has been explicitly taken into account to declare the compliance or non-compliance to the specification. The report must not be used by the client to claim product certification, approval, or endorsement by A2LA or any government agencies. Report No.: FCC_RF Exposure_KLA_CSLC300_21040101_17April2023 Page No. 2 / 23 Report Format Version: 6.1.1 Table of Contents Release Control Record .................................................................................................................................. 3 1 Certificate of Conformity ...................................................................................................................... 4 2 General Information .............................................................................................................................. 5 2.1 General Description of EUT ................................................................................................................ 5 2.2 Wireless Power Transfer ..................................................................................................................... 6 2.3 Description of Support Units ............................................................................................................... 6 2.4 Configuration of System under Test .................................................................................................... 6 2.5 Test Setup ........................................................................................................................................... 6 2.6 Test Instruments .................................................................................................................................. 7 3 Limit for Maximum Pecrmissible Exposure (MPE) ............................................................................ 8 4 Test Point Description .......................................................................................................................... 9 5 Calculation Result of Maximum Conducted Power ............................... Error! Bookmark not defined. Appendix A: Pictures of Test Arrangements ............................................................................................... 11 ppendix B: Information of the Testing Laboratories .................................................................................. 21 Appendix C: Declaration of Model Differences Letter ............................................................................... 22 Report No.: FCC_RF Exposure_KLA_CSLC300_21040101_17April2023 Page No. 3 / 23 Report Format Version: 6.1.1 Release Control Record Issue No. Description Date Issued FCC_RF Exposure_KLA_CSLC300_21040101_16mar2023 Orignal Release 03/16/2023 FCC_RF Exposure_KLA_CSLC300_21040101_17April2023 Added KDB 680106 D01 v03r01RF Exposure Wireless Charging: KDB 447498 D01 v06 04/17/2023 Report No.: FCC_RF Exposure_KLA_CSLC300_21040101_17April2023 Page No. 4 / 23 Report Format Version: 6.1.1 1 Certificate of Conformity Product: RF Large Coil Carrier Station Brand: KLA SensArray Test Model(s): CSLC300 Series Model No.: CSLC200 Sample Status: Product Validation Applicant: KLA Corporation Test Date: 03/24/2023 Standards: KDB 680106 D01 v03r01RF Exposure Wireless Charging: KDB 447498 D01 v06 The above equipment has been tested by Bureau Veritas Consumer Products Services, Inc., Milpitas Branch, and found compliance with the requirement of the above standards. The test record, data evaluation & Equipment Under Test (EUT) configurations represented herein are true and accurate accounts of the measurements of the sample’s EMC characteristics under the conditions specified in this report. Prepared by : , Date: 03/17/2023 Pushpinder Sawanni/ Test Engineer Approved by : , Date: 03/17/2023 Abhijit/ Review Engineer Report No.: FCC_RF Exposure_KLA_CSLC300_21040101_17April2023 Page No. 5 / 23 Report Format Version: 6.1.1 2 General Information 2.1 General Description of EUT Product RF Large Coil Storage Case Brand KLA SensArray Test Model CSLC300 Serial Number SA20223 Series Model CSLC200 Statu…

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FCC Designation No: US1109 FCC Reg No: 540430 CAB Identifier: 4842D TEST REPORT Issued By: Bureau Veritas Consumer Products Services, Inc. Test Location/Lab Address: 775 Montague Expy, Milpitas, CA 95035 (Limited Test Report for Radiated Spurious Emissions Only) Test Report No. FCC_RF_SL21040101-KLA-001_CSLC_Rev5.0 Brand: KLA-TENCOR FCC ID: QTA-C SLC Test Model(s ): CSLC300 Series Model No.: CSLC200/CSLC300 Applicant: KLA-TENCOR Address: One Technology Drive, Milpitas, CA 95035 Manufacturer: KLA-TENCOR Address: One Technology Drive, Milpitas, CA 95035 Received Date 07/26/2021 Test Date: 10/25/2021 – 01/06/2022 Issued Date: 02/03/2023 The above equipment has been tested by Bureau Veritas Consumer Products Services, Inc., Milpitas Branch, and found compliant with the requirement of the standards listed in section 2.2. The test record, data evaluation & Equipment Under Test (EUT) configurations represented herein are true and accurate accounts of the measurements of the sample’s characteristics under the conditions specified in this report. Prepared by: James Ma, Test Engineer Approved by: Suresh Kondapalli, Reviewing Engineer 1-24-2022 1-24-2022 This report is for your exclusive use. Any copying or replication of this report to or for any other person or entity, or use of our name or trademark, is permitted only with our prior written permission. This report sets forth our findings solely with respect to the test samples identified herein. The results set forth in this report are not indicative or representative of the quality or characteristics of the lot from which a test sample was taken or any similar or identical product unless specifically and expressly noted. Our report includes all of the tests requested by you and the results thereof based upon the information that you provided to us. You have 60 days from date of issuance of this report to notify us of any material error or omission caused by our negligence, provided, however, that such notice shall be in writing and shall specifically address the issue you wish to raise. A failure to raise such issue within the prescribed time shall constitute your unqualified acceptance of the completeness of this report, the tests conducted and the correctness of the report contents. Unless specific mention, the uncertainty of measurement has been explicitly taken into account to declare the compliance or non-compliance to the specification. The report must not be used by the client to claim product certification, approval, or endorsement by A2LA or any government agencies. Report No.: FCC_RF_SL21040101-KLA-001_CSLC_Rev5.0 Page No. 2 / 25 Report Format Version: 1.1 TABLE OF CONTENTS RELEASE CONTROL RECORD .......................................................................................................................... 3 1 SUMMARY OF TEST RESULTS ................................................................................................................ 4 2 GENERAL INFORMATION ....................................................................................................................... 5 2.1 Scope ............................................................................................................................................ 5 2.2 Purpose ......................................................................................................................................... 5 2.3 Description of Applied Standards .................................................................................................... 5 2.4 Information of the Testing Laboratories ........................................................................................... 5 3 Product Information .............................................................................................................................. 6 3.1 Description of Product .................................................................................................................... 6 3.2 Description of Test Modes .............................................................................................................. 7 3.3 Description Of Support Units .......................................................................................................... 7 3.3.1 Configuration of System under Test ................................................................................................ 8 4 EQUIPMENT LIST.................................................................................................................................. 9 4.1 Measurement Uncertainty .............................................................................................................. 9 4.2 Modification and Deviation Record ................................................................................................. 9 5 TEST METHOD AND RESULTS ...............................................................................................................10 5.1 Radiated Emission and Bandedge Measurement ..........................................................................10 5.1.1 Limits of Radiated Emission and Bandedge Measurement .............................................................10 5.1.2 Test Procedures ............................................................................................................................ 11 5.1.3 Test Setup .....................................................................................................................................12 5.1.4 EUT Operating Conditions .............................................................................................................13 5.1.5 Deviation from Test Standard.........................................................................................................13 5.1.6 Test Results ..................................................................................................................................14 APPENDIX A - PICTURES OF TEST AR…

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Report No.: FCC_RF_ SL21040101-KLA-001 Page No. 8 / 16 Report Format Version: 6.1.1 3.5 EUT TEST SETUP PHOTOS Radiated Emission 9KHz – 30MHz (0 Degree – Front View) Radiated Emission 9KHz – 30MHz (0 Degree – Rear View) Report No.: FCC_RF_ SL21040101-KLA-001 Page No. 9 / 16 Report Format Version: 6.1.1 Radiated Emission 30 – 1000MHz (Front View) Radiated Emission 30 – 1000MHz (Front View)