QTA-AMW120SensArray AM Wafer

FamiliesProduct LinesModels PHOENIXPHOENIXAll models that use wafers AML User Guide Document Number: 9026908-000 Revision: AA Status: Released Distribution Type: Internal Use Only Revision History: KLA requires users of this document to make sure they use the latest released version. The details of the Revision History are located on the final page of this document. Table of Contents 1. Overview: AML User Guide.................................................................................................... 3 1.1. AML: Equipment Description...............................................................................................4 1.2. AML: Leveling UI.................................................................................................................5 2. Safety: AML User Guide..........................................................................................................7 3. Prepare to Check Leveling Using the AML............................................................................. 8 3.1. Power Up the AML................................................................................................................8 3.2. Start the Leveling UI and Select the Tool..............................................................................8 3.3. Calibrate the AML...............................................................................................................11 4. Check Leveling Using the AML.............................................................................................12 4.1. Check the Leveling (Absolute Mode)..................................................................................13 4.2. Check the Leveling (Relative Mode)...................................................................................17 4.3. Use the AML as a Digital Level (QuickLevel)....................................................................21 5. AML: View History................................................................................................................23 6. AML: Add a New Tool...........................................................................................................26 7. AML: Change the Spec...........................................................................................................28 8. AML Troubleshooting............................................................................................................30 9. Additional Information...........................................................................................................33 9.1. Glossary...............................................................................................................................33 9.2. Revision History: AML User Guide....................................................................................33 9.3. Copyright.............................................................................................................................34 9.4. Trademarks...........................................................................................................................34 9.5. Reprint Acknowledgments...................................................................................................34 9.6. Branding Changes................................................................................................................34 9026908-000, Rev. AAKLA Secret – Externally RestrictedPage 2 of 34 AML User Guide 1. Overview: AML User Guide The AML is a leveling wafer tool that works with a dedicated laptop or tablet, or with the FEC of the tool whose leveling is being checked. Throughout this Guide, "computer" refers to whichever option you are using: laptop, tablet, or FEC. The AML can be used: • To check the leveling status of stations • As a digital level during the leveling process of a station In addition, the results of earlier leveling sessions can be viewed on the computer. A typical work flow: 1. Run a leveling session for the tool to check the leveling statuses of the target stations. 2. If the leveling for any station is out of spec, run a QuickLevel session for that station and adjust the leveling until the station is within spec. 3. Run a second leveling session for the tool to confirm that the stations are now in spec and to keep a record of the results. FRU Parts/Tooling Required Part Number DescriptionQuantityFRU/Tooling 0749246-00xASSY,FINAL,CAL,AM WAFER,2.5MM,EXTND BATT (includes AML and charging shell) 1Tooling One of the following options: 0764100-00xKIT,DONGLE,SW-UI,W/CASE,AML (dongle for use with FEC) 1Tooling 0764553-00xKIT,LAPTOP,DONGLE,W/CASE,AML (laptop plus dongle option) 1Tooling 0764099-00xKIT,TABLET,SW-UI,W/CASE (tablet option)1Tooling Required Documents Document Number Title 9026876-000AML Router Configuration 9026908-000, Rev. AAKLA Secret – Externally RestrictedPage 3 of 34 AML User Guide 1.1. AML: Equipment Description The AML system consists of the following: • The AML (leveling wafer) • The AML charging shell, including power supply • The AML router (dongle) that is installed on the computer • (optional) Dedicated laptop computer or tablet Equipment Rating Equipment Rating AML charger output5V max 1A max AML charger input12VDC max 3.3A max The AML wafer is for use only with batteries that have built-in protection. Wafer batteries must not be replaced by an operator. 9026908-000, Rev. AAKLA Secret – Externally RestrictedPage 4 of 34 AML User Guide Input and Output Ports EquipmentPorts AML wafer3.7V input (from battery) Environmental Conditions Equipment Environmental ParameterCondition AML waferTemperature0°C - 60°C Pressure760 Torr (atmospheric only) Air, CDA AM Leveling ChargerTemperature0°C - 85°C Clean the AML wafer only with a lint-free cloth dampened with water and IPA in a 10:1 ratio. Supplier and Manufacturer Name Address SupplierSensArray division of KLA Corporation One Technology Drive Milpitas, California 95035 USA Manufactu…

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AMW120 Regulatory Insert Part 15 statement: This device complies with Part 15 of the FCC Rules. Operation is subject to the following two conditions: (1) This device may not cause harmful interference, and (2) this device must accept any interference received, including interference that may cause undesired operation. FCC RF Exposure statement: This equipment complies with FCC radiation exposure limits set forth for an uncontrolled environment. This equipment should be installed and operated with a minimum distance of 20 cm between the radiator and your body. Integration Instructions: This transmitter module may not be co-located with any other transmitter or antenna. This transmitter module may only operate using an antenna of a type and maximum gain as listed below. AH316M245001-T, 1.9dBi gain Product Labeling: The final end product integrating this module must be labeled in a visible area with the following: “Contains FCC ID: QTA-AMW120”

SCS-F18: Project and Product Certification Representative Authorization Letter Page 1 of 2 Rev 6.0 775 Montague Expressway Milpitas, CA 95035 Tel: 408-526-1188 Fax: 408-526-1088 Email: [email protected] Project and Product Certification Representative Authorization Letter Reason for Amendment (current / obsolete) Revision History Approved Date From To Initial Release (obsolete) 1.0 1.0 Nov-14-2006 Revised wording (obsolete) 1.0 2.0 Sept–25-2007 Updated company template (obsolete) 2.0 3.0 Jan-31-2012 Updated letter information (obsolete) 3.0 4.0 May-23-2014 Added FCC ID field (obsolete) 4.0 5.0 Sep-16-2014 Updated company name & logo (current) 5.0 6.0 Jun-27-2018 SCS-F18: Project and Product Certification Representative Authorization Letter Page 2 of 2 Rev 6.0

SCS-F19: Confidentiality Request Letter Page 1 of 2 Rev 6.0 775 Montague Expressway Milpitas, CA 95035 Tel: 408-526-1188 Fax: 408-526-1088 Email: [email protected] Confidentiality Request Letter Reason for Amendment (current / obsolete) Revision History Approved Date From To Initial Release (obsolete) 1.0 1.0 Nov-14-2006 Adding CFR 2.459 (obsolete) 1.0 2.0 August – 11 - 2008 Updated company template & Added text box (obsolete) 2.0 3.0 Jan-31-2012 Added IC confidentiality letter form (obsolete) 3.0 4.0 March-26-2015 Corrections to STC form. Added reference to KDB (obsolete) 4.0 5.0 Nov-19-2015 Updated company logo (current) 5.0 6.0 Jun-26-2019 SCS-F19: Confidentiality Request Letter Page 2 of 2 Rev 6.0

SCS-F19: Confidentiality Request Letter Page 1 of 2 Rev 6.0 775 Montague Expressway Milpitas, CA 95035 Tel: 408-526-1188 Fax: 408-526-1088 Email: [email protected] Confidentiality Request Letter Reason for Amendment (current / obsolete) Revision History Approved Date From To Initial Release (obsolete) 1.0 1.0 Nov-14-2006 Adding CFR 2.459 (obsolete) 1.0 2.0 August – 11 - 2008 Updated company template & Added text box (obsolete) 2.0 3.0 Jan-31-2012 Added IC confidentiality letter form (obsolete) 3.0 4.0 March-26-2015 Corrections to STC form. Added reference to KDB (obsolete) 4.0 5.0 Nov-19-2015 Updated company logo (current) 5.0 6.0 Jun-26-2019 SCS-F19: Confidentiality Request Letter Page 2 of 2 Rev 6.0

SCS-F26 Modular Approval Letter Page 1 of 3 Rev 12.0 775 Montague Expressway Milpitas, CA 95035 Tel: 408-526-1188 Fax: 408-526-1088 Email: [email protected] Modular Approval Declaration Letter Reason for Amendment (current / obsolete) Revision History Approved Date From To Initial Release (Obsolete) 1.0 1.0 Dec-04-2006 Added IC Modular Letter (Obsolete) 1.0 2.0 Feb 16 2009 Add LMA and MA option (Obsolete) 2.0 3.0 April 14 2010 Revised per RSS Gen issue 3.0 (Obsolete) 3.0 4.0 Jan 12 2011 Removed Foot(2) (obsolete) 4.0 5.0 July 19 2011 Adding New note per KDB996369 D01 V01R03 (obsolete) 5.0 6.0 August 29 2011 Updated company template & Added text box (obsolete) 6.0 7.0 Jan-31-2012 Updated modular requirement (obsolete) 7.0 8.0 Sept 05 2014 Updated template to meet RSP 100 issue 10 (obsolete) 8.0 9.0 Nov 20 2014 Updated template to meet RSP 100 issue 11 (obsolete)) 9.0 10.0 March 19 2015 Revised the Modular Requirement statements (obsolete) 10.0 11.0 July 28, 2016 Updated template with BV logo (current) 11.0 12.0 June 26, 2019 SCS-F26 Modular Approval Letter Page 2 of 3 Rev 12.0 SCS-F26 Modular Approval Letter Page 3 of 3 Rev 12.0

SCS-F190 WiFi Channel 12&13 Declaration Letter Page 1 of 2 Rev.2.0 Created by William Graff Approved by Bao-Thuong Nguyen WIFI Channel 12 and 13 Declaration Letter Reason for Amendment Revision History Approved Date From To Initial Release (obsolete) Initial 1.0 December 22, 2015 Modify the select options (current) 1.0 2.0 September 23, 2016 SCS-F190 WiFi Channel 12&13 Declaration Letter Page 2 of 2 Rev.2.0 Created by William Graff Approved by Bao-Thuong Nguyen

MPE CALCULATION FCC ID: QTA-AMW120 RF Exposure Requirements: 47 CFR §1.1307(b) RF Radiation Exposure Limits: 47 CFR §1.1310 RF Radiation Exposure Guidelines: FCC OST/OET Bulletin Number 65 EUT Frequency Band: 2.4GHz 2412-2462 MHz, Limits for General Population/Uncontrolled Exposure in the band of: 1500 - 100,000 MHz Power Density Limit: 1 mW / cm 2 Equation: S = PG / 4R 2 or R = √PG / 4S Where, S = Power Density P = Power Input to Antenna G = Antenna Gain R = distance to the center of radiated antenna ______________________________________________________________________________________________________________________ EUT: SensArray® AM Wafer, Model No.: AMW120 Type CH Freq (MHz) Conducted Power (dBm) Antenna Gain (dBi) Tune-Up Tolerance Tolerance Max Power (dBm) Measurement Distance (cm) Calculated MPE (mW/cm 2 ) MPE Limit (mW/cm 2 ) Pass/Fa il 2.4G WLAN 2437 16.025 1.9 ±1dB 17.025 20 0.016 1 Pass The Above Result had shown that the device complied with MPE requirement at a prediction distance of 20cm. Completed By: Cipher Chu SIEMIC, Inc 775 Montague Expressway, Milpitas, CA 95035 Phone: (408) 526-1188 Date: 08/07/2019

775 Montague Expressway, Milpitas, CA 95035, USA • Phone: (+1) 408 526 1188 • Facsimile (+1) 408 526 1088 Visit us at: www.siemic.com; Follow us at: Report No.: FCC_IC_SL18121801-KLA-021-DTS_Rev3.0 Supersede Report No.: FCC_IC_SL18121801-KLA-021-DTS_Rev2.0 Applicant : KLA Corporation Product Name : SensArray® AM Wafer Model No. : AMW120 Test Standard : 47 CFR 15.247 RSS 247 Iss 2: Feb 2017 Test Method : ANSI C63.10: 2013 RSS Gen Iss 5: Apr 2018 558074 D01 DTS Meas Guidance v05r01 FCC ID : QTA-AMW120 IC : 10516A-AMW120 Dates of test : 03/01/2019 – 03/10/2019 Issue Date : 03/30/2020 Test Result : ☒ Pass ☐ Fail Equipment complied with the specification [X] Equipment did not comply with the specification [ ] This Test Report is Issued Under the Authority of: Cipher Chen Ge Test Engineer Engineer Reviewer Issued By: SIEMIC Laboratories 775 Montague Expressway, Milpitas, 95035 CA RF TEST REPORT Test report No. FCC_IC_SL18121801-KLA-021-DTS_Rev3.0 Page 2 of 55 775 Montague Expressway, Milpitas, CA 95035, USA • Phone: (+1) 408 526 1188 • Facsimile (+1) 408 526 1088 Visit us at: www.siemic.com; Follow us at: Laboratory Introduction SIEMIC, headquartered in the heart of Silicon Valley, with superior facilities in US and Asia, is one of the leading independent testing and certification facilities providing customers with one-stop shop services for Compliance Testing and Global Certifications. In addition to testing and certification, SIEMIC provides initial design reviews and compliance management throughout a project. Our extensive experience with China, Asia Pacific, North America, European, and International compliance requirements, assures the fastest, most cost effective way to attain regulatory compliance for the global markets. Accreditations for Conformity Assessment Country/Region Accreditation Body Scope USA FCC, A2LA EMC, RF/Wireless, Telecom Canada IC, A2LA, NIST EMC, RF/Wireless, Telecom Taiwan BSMI, NCC, NIST EMC, RF, Telecom, Safety Hong Kong OFTA, NIST RF/Wireless, Telecom Australia NATA, NIST EMC, RF, Telecom, Safety Korea KCC/RRA, NIST EMI, EMS, RF, Telecom, Safety Japan VCCI, JATE, TELEC, RFT EMI, RF/Wireless, Telecom Mexico NOM, COFETEL, Caniety Safety, EMC, RF/Wireless, Telecom Europe A2LA, NIST EMC, RF, Telecom, Safety Israel MOC, NIST EMC, RF, Telecom, Safety Accreditations for Product Certifications Country Accreditation Body Scope USA FCC TCB, NIST EMC, RF, Telecom Canada IC FCB, NIST EMC, RF, Telecom Singapore iDA, NIST EMC, RF, Telecom EU NB EMC & R&TTE Directive Japan MIC (RCB 208) RF, Telecom Hong Kong OFTA (US002) RF, Telecom Test report No. FCC_IC_SL18121801-KLA-021-DTS_Rev3.0 Page 3 of 55 775 Montague Expressway, Milpitas, CA 95035, USA • Phone: (+1) 408 526 1188 • Facsimile (+1) 408 526 1088 Visit us at: www.siemic.com; Follow us at: CONTENTS 1 REPORT REVISION HISTORY ....................................................................................................................................... 4 2 EXECUTIVE SUMMARY ................................................................................................................................................. 5 3 CUSTOMER INFORMATION .......................................................................................................................................... 5 4 TEST SITE INFORMATION ............................................................................................................................................ 5 5 MODIFICATION ............................................................................................................................................................. 5 6 EUT INFORMATION ...................................................................................................................................................... 6 6.1 EUT Description ........................................................................................................................................................ 6 6.2 Radio Description ...................................................................................................................................................... 6 7 SUPPORTING EQUIPMENT/SOFTWARE AND CABLING DESCRIPTION ......................................................................... 7 7.1 Supporting Equipment ............................................................................................................................................... 7 7.2 Cabling Description ................................................................................................................................................... 7 7.3 Test Software Description .......................................................................................................................................... 7 8 TEST SUMMARY ........................................................................................................................................................... 8 9 MEASUREMENT UNCERTAINTY ................................................................................................................................... 9 9.1 Emissions (30MHz to 1GHz)....................................................................................................................................... 9 9.2 Radiated Emissions (1GHz to 40GHz) ......................................................................................................................... 9 9.3 RF conducted measurement..................................................................................................................................... 10 10 MEASUREMENTS, EXAMINATION AND DERIVED RESULTS .................................................................................. 11 10.1 Conducted Emissions .......................................................................................................................................... 11 10.2 6dB & 99% Bandwidth .......................…

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Setup Photo View Radiated Emission Test below 30MHz Front View Radiated Emission Test below 30MHz Rear View Radiated Emission Test below 1GHz Front View Radiated Emission Test below 1GHz Rear View Conducted Emission Test Front View Conducted Emission Test Rear View