QTA-RFSC812AIntegral Wafer Storage Case for 200 and 300mm Wafers

EtchTemp Wafer™ User Manual KLA-Tencor SensArray ® 5451 Patrick Henry Dr. Santa Clara, CA 95054 408-986-5600 Fax 408-986-5601 [email protected] www.sensarray.com 86-3820 Version-1.0 KLA-Tencor Confidential Copyright © 2009 by KLA-Tencor. All rights reserved worldwide. No parts of this publication may be reproduced, modified, transmitted, transcribed, stored in retrieval systems, or translated into any human or computer language, in any form or by any means, electronic, mechanical, magnetic, chemical, manual, or otherwise, without the express written permission of KLA-TENCOR, One Technology Drive, Milpitas, California 95035. KLA-TENCOR may revise this document at any time without notice. UM-INT- 2007.04 This manual applies to EtchTemp Wafer EtchTemp Wafers are trademarks of KLA Tencor SensArray. KLA-Tencor reserves the right to modify, change, or improve any or all specifications published in this document without notice. 86-3820 Version-1.0 KLA-Tencor Confidential II Important Notices Warranty EtchTemp Wafer System Hardware KLA-Tencor warrants that the EtchTemp Wafer Systems (“Products”) sold will be free from defects in material and workmanship, and perform to KLA-Tencor’s applicable published specifications for a period of 12 months after shipment for the Docking Station. The EtchTemp is warranted for a specified number of operating hours. Refer to the specification provided with your wafer for the exact warranty terms. The Products that comprise the System shall include the Docking Station. The liability of KLA-Tencor hereunder shall be limited to replacing or repairing, at its option, any defective Products that are returned F.O.B. to KLA-Tencor SensArray division plant in Santa Clara, CA. In no case are Products to be returned without the purchaser first obtaining SensArray’s permission and Returned Materials Authorization [RMA] number. In no event shall SensArray be liable for any consequential or incidental damages. Products that have been subject to abuse, misuse, accident, alteration, neglect, or unauthorized repair or installation are not covered by this warranty. SensArray will make the final determination as to the existence and cause of any alleged defect. SensArray is not responsible for maintaining or supplying any consumable materials used in conjunction with this hardware. No warranty is made with respect to any customized equipment or Products supplied with EtchTemp Wafer systems where produced to Purchaser’s specifications except as specifically stated in writing by SensArray in the contract for such Products. The purchaser will pay the shipping costs of returned materials to SensArray; SensArray will pay the cost of shipping repaired/replaced material to Purchaser. This Warranty is the only warranty made by SensArray with respect to the Product delivered hereunder and may be modified only by a written instrument that is signed by a duly authorized officer of SensArray and accepted by Purchaser. Except as provided above, SensArray makes no warrantees, expressed or implied, including any warranty of merchantability for a particular purpose. SensArray Tool Software KLA-Tencor (SensArray division) warrants that (a) SensArray Tools software (Software) will perform substantially in accordance with the accompanying written materials for a period of 12 months after shipment, and (b) the medium on which the Software is recorded will be free from defects in materials and workmanship under normal use and service for a period of 12 months after shipment. Faults caused by unauthorized modification, misuse or abuse of products, or problems due to software not supplied by SensArray, are not covered by this Warranty. During the Warranty Period, the purchaser may return failed Software to SensArray for repair or replacement, at SensArray’s option. SensArray does not warrant that the operation of the Software shall be uninterrupted or error free. The purchaser will first notify SensArray of the nature of the problem and obtain a Returned Materials Authorization [RMA] number. The purchaser will pay the costs of shipping returned Software to SensArray; SensArray will pay the cost of shipping repaired/replaced Software to the purchaser. No other warranty is expressed or implied. SensArray specifically disclaims the implied warranty of merchantability and fitness for a specific application. The SensArray Tool Software Documentation Materials (“Documentation”) are subject to revision and change without notice. SensArray agrees to make a best effort attempt to keep the purchaser advised of changes to the Documentation. 86-3820 Version-1.0 KLA-Tencor Confidential III Software License Agreement The Software is owned by KLA-Tencor (SensArray division) and is protected by United States copyright laws and international treaty provisions. Therefore, you must treat the Software like any other copyrighted material. Under the Copyright Laws, the Integral Wafer Software, or accompanying written materials, may not be copied, photo-copied, reproduced, translated, in whole or in part, without the prior written permission of SensArray. You may make one copy of the Software solely for backup or archival purposes. Third-Party Software Licenses for any software which was provided but not produced by SensArray are granted solely and only by the original supplier or manufacturer and solely and only with the supplier’s limitations and rights. Copying restrictions for such software are governed solely and only by the original supplier or manufacturer’s license or any other supplier- approved agreements, as applicable. Trademarks EtchTemp wafer, Integral Wafer™, SensArray Tools are trademarks of KLA-Tencor (SensArray division). Windows and Excel are trademarks or trade names of Microsoft Corporation. Any other terms mentioned in this document that are known to be trademarks or service marks have been appropriately capitalized. Use of a term in this document should not be regarded as affecting the validity of any…

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Non-Contact Integral Wafer™ User Manual 5451 Patrick Henry Dr. Santa Clara, CA 95054 408-986-5600 Fax 408-986-5601 [email protected] www.sensarray.com Copyright © 2006 by °SensArray ® Corporation. All rights reserved. UM-INT- 2007.04 SensArray reserves the right to modify, change, or improve any or all specifications published in this document without notice. Important Notices Warranty Integral Wafer System Hardware SensArray Corporation warrants that the contact style or non-contact style Integral Wafer Systems (“Products”) sold will be free from defects in material and workmanship, and perform to SensArray’s applicable published specifications for a period of 12 months after shipment for the Docking Station. The Integral Wafer is warranted for 6 months or a specified number of operating hours, whichever occurs first. Refer to the specification provided with your wafer for the exact warranty terms. The Products that comprise the System shall include the Docking Station. The liability of SensArray hereunder shall be limited to replacing or repairing, at its option, any defective Products that are returned F.O.B. to SensArray’s plant in Santa Clara, CA. In no case are Products to be returned without the purchaser first obtaining SensArray’s permission and Returned Materials Authorization [RMA] number. In no event shall SensArray be liable for any consequential or incidental damages. Products that have been subject to abuse, misuse, accident, alteration, neglect, or unauthorized repair or installation are not covered by this warranty. SensArray will make the final determination as to the existence and cause of any alleged defect. SensArray is not responsible for maintaining or supplying any consumable materials used in conjunction with this hardware. No warranty is made with respect to any customized equipment or Products supplied with Integral Wafer systems where produced to Purchaser’s specifications except as specifically stated in writing by SensArray in the contract for such Products. The purchaser will pay the shipping costs of returned materials to SensArray; SensArray will pay the cost of shipping repaired/replaced material to Purchaser. This Warranty is the only warranty made by SensArray with respect to the Product delivered hereunder and may be modified only by a written instrument that is signed by a duly authorized officer of SensArray and accepted by Purchaser. Except as provided above, SensArray makes no warrantees, expressed or implied, including any warranty of merchantability for a particular purpose. Integral Wafer Software SensArray Corporation warrants that (a) Integral Wafer software (Software) will perform substantially in accordance with the accompanying written materials for a period of 12 months after shipment, and (b) the medium on which the Software is recorded will be free from defects in materials and workmanship under normal use and service for a period of 12 months after shipment. Faults caused by unauthorized modification, misuse or abuse of products, or problems due to software not supplied by SensArray, are not covered by this Warranty. During the Warranty Period, the purchaser may return failed Software to SensArray for repair or replacement, at SensArray’s option. SensArray does not warrant that the operation of the Software shall be uninterrupted or error free. The purchaser will first notify SensArray of the nature of the problem and obtain a Returned Materials Authorization [RMA] number. The purchaser will pay the costs of shipping returned Software to SensArray; SensArray will pay the cost of shipping repaired/replaced Software to the purchaser. No other warranty is expressed or implied. SensArray specifically disclaims the implied warranty of merchantability and fitness for a specific application. The Integral Wafer Software Documentation Materials (“Documentation”) are subject to revision and change without notice. SensArray agrees to make a best effort attempt to keep the purchaser advised of changes to the Documentation. Software License Agreement The Software is owned by SensArray Corporation and is protected by United States copyright laws and international treaty provisions. Therefore, you must treat the Software like any other copyrighted material. Under the Copyright Laws, the Integral Wafer Software, or accompanying written materials, may not be copied, photo-copied, reproduced, translated, in whole or in part, without the prior written permission of SensArray. You may make one copy of the Software solely for backup or archival purposes. You may make 10 copies of the written materials accompanying the SensArray Corporation-produced Software provided that such copies are solely for use by personnel using the Integral Wafer System. All rights not expressly granted to you in this Agreement are reserved to SensArray Corporation. Third-Party Software Licenses for any software which was provided but not produced by SensArray Corporation are granted solely and only by the original supplier or manufacturer and solely and only with the supplier’s limitations and rights. Copying restrictions for such software are governed solely and only by the original supplier or manufacturer’s license or any other supplier-approved agreements, as applicable. Trademarks °SensArray ® , Thermal MAP, Integral Wafer™, and Process Probe ® are trademarks of SensArray Corporation. Windows and Excel are trademarks or trade names of Microsoft Corporation. Any other terms mentioned in this document that are known to be trademarks or service marks have been appropriately capitalized. Use of a term in this document should not be regarded as affecting the validity of any trademark or service mark. Some of the technology used in this product is acquired under license from the management and operating contractor of the Oak Ridge National Laboratory on behalf of the U.S. Department of Energy. Radio Frequency Interference Compliance Applies to the Storage Cases and RF Carrier Sta…

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KLA-Tencor Corporation One Technology Drive Tel: 408.875.3000 Milpitas, CA 95035 Fax: 408.875.4144 10/15/2014 Federal Communications Commission 7435 Oakland Mills Road Columbia, MD 21046 Subject: Request for Permanent Confidentiality To whom it may concern: In accordance with 47CFR Section 0.457 and Section 0.459 pertaining to confidential material, we hereby request to hold permanently confidential all information contained within the below identified exhibits/document categories submitted pursuant to radio equipment certification requirements for FCC ID: QTA-RFSC812A 1. Block Diagram 2. Operational Description 3. Schematics 4. Parts List / Tune-Up Procedure The above material contains trade secrets and proprietary information as specified by 47CFR 0.457(d) and technical data, which would customarily be guarded from competitors. The public disclosure of this information might be harmful to our company and provide unjustified benefits to our competitors. Sincerely, Dan Lopez Vice President General Manager, SensArray Division KLA-Tencor 1 Technology Drive Milpitas, California 95035 (408)-875-6221

MATERIAL OVERLAM ADHESIVE COPY COLOR BACKGROUND .002” WHITE POLYESTER N/A PERMANENT BLACK WHITE DIMENSIONS ARE IN INCHES UNLESS OTHERWISE SHOWN O. K. EXACTLY AS IS, NO CHANGES AT ALL! SUBMIT CORRECTED PROOF FOR ANY CHANGES. SIGNATURE PLEASE CHECK THIS PROOF FOR ACCURACY INCLUDING COLOR CALL OUT, SIZE, SHAPE, TEXT, HOLE PLACEMENT, CORNER RADIUS OR SQUARE, PART NUMBER, MATERIAL, AND SPELLING. DO NOT USE THIS AS A COLOR MATCH GUIDE. PARTS WILL BE MATCHED TO PMS COLOR CALL OUT, AND NOT TO .PDF OR A COLOR PRINT. YOUR SIGNATURE ON THIS PROOF INDICATES THAT YOU AUTHORIZE MELROSE TO PROCEED AS SHOWN ON THIS PROOF. WE CONFORM TO THE PRACTICE OF CHARGING FOR CHANGES WHICH WERE NOT PART OF THE ORIGINAL SET-UP. CUSTOMER MOTIVATED CHANGES MADE AT THIS STAGE MAY BE BILLED AT $80 PER HOUR (1/2 HOUR MINIMUM ). CHANGES MAY ALSO DELAY YOUR JOB BY 2 OR MORE DAYS. THANK YOU FOR HELP IN EXPEDITING YOUR JOB. 12 1 2 3 3 4 4 5 5 6 6 A A BB C C DD SECOND PROOF 11 X 8.5 4/9/13 20566007 LH SHEET SIZE DATE P.O. DESIGNER GENERAL TOLERANCES: UNLESS OTHERWISE SPECIFIED 52715-1 FCC Label JOB NUMBER PART NO. INSCALE:1 : 11 of 1SHEET:REV:UNIT:- MELROSE NAMEPLATE & LABEL CO. 26575 CORPORATE AVENUE, HAYWARD CA 94545 (510) 732-3100 FAX (510) 732-3111 WWW.MELROSE-NL.COM .X ± 0.1" .XX ± 0.03" .XXX ± 0.020" ± 5º IF THE PRINT OUT DIMENSIONS ARE NOT TO SCALE, THE DISTORTION MAY BE CAUSED BY THE PRINTER OR THE PRINTER SOFTWARE SETTINGS (SEE PRINT SET-UP PROPERTIES). This device complies with Part 15 of the FCC Rules. Operation is subject to the following two conditions: (1) This device may not cause harmful interference, and (2) This device must accept any interference received, including interference that may cause undesired operation. This device complies with Part 15 of the FCC Rules. Operation is subject to the following two conditions: (1) This device may not cause harmful interference, and (2) This device must accept any interference received, including interference that may cause undesired operation. NOTE: * TEXT FONT USED 5.75PT ARIAL REGULAR. * CHANGED SIZE PER REQUEST. 1.400" 1.000" CUT LINE WILL NOT PRINT

This report contains a total of 37 pages and may be reproduced in full only. Partial reproduction may only be done with the written consent of CKC Laboratories, Inc. KLA-Tencor ADDENDUM TO TEST REPORT 92849-9 Wafer Maintenance System Model: Storage Case 300 Tested To The Following Standards: FCC Part 15 Subpart C Sections 15.209 and RSS-210 Issue 8 Report No.: 92849-9A Date of issue: October 17, 2013 This test report bears the accreditation symbol indicating that the testing performed herein meets the test and reporting requirements of ISO/IEC 17025 under the applicable scope of EMC testing for CKC Laboratories, Inc. We strive to create long-term, trust based relationships by providing sound, adaptive, customer first testing services. We embrace each of our customers’ unique EMC challenges, not as an interruption to set processes, but rather as the reason we are in business. A Page 2 of 37 Report No.: 92849-9A TABLE OF CONTENTS Administrative Information ........................................................................................................................................... 3 Test Report Information ............................................................................................................................................ 3 Report Authorization ................................................................................................................................................. 3 Test Facility Information ............................................................................................................................................ 4 Site Registration & Accreditation Information .......................................................................................................... 4 Summary of Results ................................................................................................................................................... 5 Conditions During Testing.......................................................................................................................................... 5 Equipment Under Test ............................................................................................................................................... 6 Peripheral Devices ..................................................................................................................................................... 6 FCC Part 15 Subpart C .................................................................................................................................................... 7 15.31(e) Voltage Variations ....................................................................................................................................... 7 15.209 Radiated Emissions ........................................................................................................................................ 9 2.1046 RF Power Output ......................................................................................................................................... 25 -20dBc Bandwidth ................................................................................................................................................... 32 RSS-210 99% Bandwidth .......................................................................................................................................... 34 Supplemental Information .......................................................................................................................................... 36 Measurement Uncertainty ...................................................................................................................................... 36 Emissions Test Details .............................................................................................................................................. 36 A Page 3 of 37 Report No.: 92849-9A ADMINISTRATIVE INFORMATION Test Report Information REPORT PREPARED FOR: REPORT PREPARED BY: KLA-Tencor SensArray Division One Technology Drive Milpitas, CA 95035 Morgan Tramontin CKC Laboratories, Inc. 5046 Sierra Pines Drive Mariposa, CA 95338 Representative: Jim Bella Project Number: 92849 Customer Reference Number: 20474736 DATE OF EQUIPMENT RECEIPT: September 9, 2013 DATE(S) OF TESTING: May 9, 2012 – October 11, 2013 Original: Testing of the Wafer Maintenance System, Storage Case 300to FCC Part 15 Subpart C Section 15.209 and RSS 210 Issue 8. Addendum A: In the original report portions of the transmitter were not tested. All data has been replaced with new testing. Report Authorization The test data contained in this report documents the observed testing parameters pertaining to and are relevant for only the sample equipment tested in the agreed upon operational mode(s) and configuration(s) as identified herein. Compliance assessment remains the client’s responsibility. This report may not be used to claim product endorsement by A2LA or any government agencies. This test report has been authorized for release under quality control from CKC Laboratories, Inc. Steve Behm Director of Quality Assurance & Engineering Services CKC Laboratories, Inc. A Page 4 of 37 Report No.: 92849-9A Test Facility Information Our laboratories are configured to effectively test a wide variety of product types. CKC utilizes first class test equipment, anechoic chambers, data acquisition and information services to create accurate, repeatable and affordable test results. TEST LOCATION(S): CKC Laboratories, Inc. 1120 Fulton Place Fremont, CA 94539 Site Registration & Accreditation Information Location CB # Taiwan Canada FCC Japan Fremont US0082 SL2-IN-E-1148R 3082B-1 958979 R-2160 C-2332 T-228 G-522 A Page 5 of 37 Report No.: 92849-9A SUMMARY OF RESULTS Standard / Specification: FCC Part 15 Subpart C 15.109 / RSS-210 Issue 8 Description Test Procedure/Method Results Voltage Variation FCC Part 15 Subpart C Sec…

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